Celerity, Inc.

Brooks Instrument, LLC

Advantage Group International Inc.

Eric J Redemann

Chiun Wang

Nelson Urdaneta

Hao Duan

Aaron S Tint

Thomas Owen Maginnis

William L Manofsky, Jr

Christopher Andrew Wacinski

Donald H Julian

A fluid delivery system includes a manifold plate having an upper surface, four vertical sides, and a lower surface opposite the upper surface, where the manifold plate includes a gas inlet, a gas outlet, and a plurality of component receiving stations, one or more component receiving stations located on the upper surface and two or more component receiving stations located on the lower surface. The manifold plate also includes a plurality of internal fluid passageways interconnecting the gas inlet, the plurality of component receiving stations, and the gas outlet. The system also includes a plurality of active fluid components, one active fluid component coupled to a corresponding one component receiving station on the manifold plate. The fluid delivery system can be configured having a single channel or a dual channel.

Manifold system for gas and fluid delivery

An improved flow measuring device, such as a mass flow meter or mass flow controller, providing a high turn-down ratio as compared to prior art devices. In accordance with various embodiments of the invention, a flow sensor includes a sensor flow path that includes one or more restrictions configured to provide the sensor flow path with a non-linear relationship between a pressure drop across the sensor flow path and the flow of fluid through the flow sensor conduit. Such a flow sensor preferably achieves a high turn-down ratio by way of a variable bypass ratio that is directly proportional to the sensor tube mass flow rate so that the turn-down ratio of the mass flow controller will be ideally proportional to the square of the turndown achievable by the flow sensor conduit fluid sensing portion alone. In some embodiments, the restriction can be employed as a part of a fluid seal having an orifice and disposed between a flow sensor portion of a flow meter and a bypass portion of the flow meter.

System for and method of providing a wide-range flow controller

A thermal mass flow meter associated with an inclination sensor that detects an angle of inclination of at least one portion of a thermal mass flow sensor relative to at least one reference axis. Based upon the detected angle of inclination, the output signal of the mass flow meter that is indicative of the mass flow rate of fluid through the sensor may be compensated to account for any inaccuracies relating to the orientation in which the mass flow meter is installed. Inaccuracies for which compensation may be provided include thermal siphoning effects and fluid buoyancy effects. By compensating for such inaccuracies, the mass flow meter may be used in any orientation, and/or may be used in non-inertial (e.g., accelerating) environments. The flow meter may be used as a stand alone device, or incorporated in a thermal mass flow controller.

Mass flow meter or controller with inclination sensor

An ultrasonic flow meter includes a conduit, a first ultrasonic transducer, a second ultrasonic transducer, and a controller. The first ultrasonic transducer is disposed at a first position about a first portion of the conduit to transmit a first ultrasonic signal and to receive a second ultrasonic signal. The second ultrasonic transducer is disposed at a second position about a second portion of the conduit that is spaced apart from the first position along a length of the conduit to transmit the second ultrasonic signal and to receive the first ultrasonic signal. The controller is configured to cross-correlate the first and second received ultrasonic signals and generate a resulting time-domain signal, analyze the resulting time-domain signal to determine a difference in transit time between the first and second received ultrasonic signals, and calculate a rate of flow of a fluid in the conduit based upon the determined difference.

Ultrasonic liquid flow controller

Growing community of inventors

Corona Del Mar, CA, United States of America

Eric J Redemann