Applied Materials, Inc.

Eric J Hoffmann

Sanjeev Baluja

Ashutosh Agarwal

Kartik Bhupendra Shah

Dhritiman Subha Kashyap

Amit Rajendra Sherekar

Vijay D Parkhe

Tejas Ulavi

Apparatus and methods for loading and unloading substrates from a spatial processing chamber are described. A support assembly has a rotatable center base and support arms extending therefrom. A support shaft is at the outer end of the support arms and a substrate support is on the support shaft. Primary lift pins are positioned within openings in the substrate support. Secondary lift pins are positioned within openings in the support arms and are aligned with the primary lift pins. An actuation plate within the processing volume causes, upon movement of the support assembly, the primary lift pins to elevate through contact with the secondary lift pins.

Apparatus and methods to transfer substrates into and out of a spatial multi-substrate processing tool

Gas distribution plate

A heater assembly having a backside purge gap formed between a top plate and a heater of the heater assembly, the top plate having a top plate wall. The top plate wall having an upper portion, a middle portion and a lower portion, the middle portion forming an incline relative to the top portion.

Heater assembly with purge gap control and temperature uniformity for batch processing chambers

Lift pin

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San Francisco, CA, United States of America

Eric J Hoffmann