Applied Materials, Inc.

Eric H Liu

Sergey D Lopatin

Robert Z Bachrach

Connie P Wang

Michael C Kwan

Dmitri A Brevnov

Pravin K Narwankar

Lance A Scudder

Thomas Knisley

Gao Liu

Yuriy Melnik

Sukti Chatterjee

Ajey M Joshi

David Alexander Britz

Donghai Wang

Kenichi Ohno

Hui Zhao

Guo Ai

Zhihui Wang

Dimitri A Brevnov

Embodiments of the present disclosure generally relate to protective coatings on substrates and methods for depositing the protective coatings. In one or more embodiments, a method of forming a protective coating on a substrate includes depositing a chromium oxide layer containing amorphous chromium oxide on a surface of the substrate during a first vapor deposition process and heating the substrate containing the chromium oxide layer comprising the amorphous chromium oxide to convert at least a portion of the amorphous chromium oxide to crystalline chromium oxide during a first annealing process. The method also includes depositing an aluminum oxide layer containing amorphous aluminum oxide on the chromium oxide layer during a second vapor deposition process and heating the substrate containing the aluminum oxide layer disposed on the chromium oxide layer to convert at least a portion of the amorphous aluminum oxide to crystalline aluminum oxide during a second annealing process.

Methods for forming protective coatings containing crystallized aluminum oxide

A simple solution processing method is developed to achieve uniform and scalable stabilized lithium metal powder coating on Li-ion negative electrode. A solvent and binder system for stabilized lithium metal powder coating is developed, including the selection of solvent, polymer binder and enhancement of polymer concentration. The enhanced binder solution is 1% concentration of polymer binder in xylene, and the polymer binder is chosen as the mixture of poly(styrene-co-butadiene) rubber (SBR) and polystyrene (PS). Long-sustained, uniformly dispersed stabilized lithium metal powder suspension can be achieved with the enhanced binder solution. A uniform stabilized lithium metal powder coating can be achieved with simple doctor blade coating method and the resulting stabilized lithium metal powder coating can firmly glued on the anode surface. With the prelithiation of negative electrode by stabilized lithium metal powder, improvements in electrochemical performances are demonstrated in both graphite/NMC and SiO/NMC full-cell.

Anode structure with binders for silicon and stabilized lithium metal powder

High capacity energy storage devices and energy storage device components, and more specifically, to a system and method for fabricating such high capacity energy storage devices and storage device components using processes that form three-dimensional porous structures are provided. In one embodiment, an anode structure for use in a high capacity energy storage device, comprising a conductive collector substrate, a three-dimensional copper-tin-iron porous conductive matrix formed on one or more surfaces of the conductive collector substrate, comprising a plurality of meso-porous structures formed over the conductive current collector, and an anodically active material deposited over the three-dimensional copper-tin-iron porous conductive matrix is provided. In certain embodiments, the three-dimensional copper-tin-iron porous conductive matrix further comprises a plurality of columnar projections formed on the conductive current collector with the plurality of meso-porous structure formed on the plurality of columnar projections.

Manufacturing of high capacity prismatic lithium-ion alloy anodes

A method and apparatus are disclosed for depositing a dielectric film in a gap having an aspect ratio at least as large as 6:1. By cycling the gas chemistry of a high-density-plasma chemical-vapor-deposition system between deposition and etching conditions, the gap may be substantially 100% filled. Such filling is achieved by adjusting the flow rates of the precursor gases such that the deposition to sputtering ratio during the deposition phases is within certain predetermined limits.

Gas chemistry cycling to achieve high aspect ratio gapfill with HDP-CVD

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Los Altos, CA, United States of America

Eric H Liu