Fei Comapny

Eric Gerardus Bosch

Ivan Lazić

Bert Henning Freitag

Ali Mohammadi-Gheidari

Ivan Lazic

Stefano Vespucci

Gerard Van Veen

Robert Imlau

A method for imaging a sample with charged particles comprises directing charged particles towards the sample along a primary axis, and simultaneously detecting a first portion and a second portion of the charged particles transmitted through the sample with a first detector and a second detector, respectively. The second detector is positioned downstream of the first detector. Each of the transmitted charged particles exits the sample at an exit angle between a direction of the transmitted charged particle and the primary axis. The exit angles of the first portion of the transmitted charged particles overlap with the exit angles of the second portion of the transmitted charged particles. In this way, complimentary information, such as the structural and compositional information, may be obtained simultaneously.

System and method for simultaneous phase contrast imaging and electron energy-loss spectroscopy

A method of imaging a specimen in a Scanning Transmission Charged Particle Microscope, comprising the following steps:

Discriminative imaging technique in scanning transmission charged particle microscopy

Techniques for multi-beam scanning transmission charged particle microscopy are disclosed herein. An example apparatus at least includes a charged particle beam column to produce a plurality of charged particle beams and irradiate a specimen with each of the plurality of charged particle beams, and an imaging system to collect charged particles of each of the charged particle beams of the plurality of charged particle beams that traverse the specimen during said irradiation, and to direct each charged particle beam of the plurality of the charged particle beams after traversing the sample onto a detector, where each charged particle beam includes a barycenter, and where the detector is disposed in an intermediate location between a back focal plane and an imaging plane of the imaging system.

Multi-beam scanning transmission charged particle microscope

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Eindhoven, Netherlands

Eric Gerardus Bosch