Commissariat a L'energie Atomique

Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

Eric Fribourg-Blanc

Emmanuel Defay

Bruno Mourey

Stéphanie Le Calvez

Xiaohong Zhu

The invention relates to a process for forming a lead-based ceramic oxide dielectric material comprising at least one pyrochlore crystalline phase, which process comprises the following steps: a) a step of depositing at least one amorphous layer of said lead-based ceramic oxide material on a substrate; and b) a crystallization annealing step carried out on said amorphous layer at a temperature not exceeding 550&#xb0; C., by means of which a lead-based ceramic oxide dielectric material comprising at least one pyrochlore phase is obtained. Application to the fabrication of capacitors on integrated circuits.

Process for forming a ceramic oxide material with a pyrochlore structure having a high dielectric constant and implementation of this process for applications in microelectronics

A method for fabricating a device provided with one or more cavities filled with at least one liquid, comprising the steps of: (a) forming one or more microcavities on a support separated from each other by one or more walls, and filled with at least one given porous material; (b) filling, in at least one cavity filled with said porous material, by means of at least one given functional liquid; and (c) forming a sealing layer enabling said cavities to be sealed.

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Brunoy, France

Eric Fribourg-Blanc