Applied Materials, Inc.

Eric Farahmand E Askarinam

Kenneth S Collins

Michael Robert Rice

Ananda H Kumar

Shamouil Shamouilian

Kadthala Ramaya Narendrnath

Edwin Charles Weldon

A temperature control system is used to control the temperature of a process chamber during processing of a semiconductor substrate The temperature control system comprises a heat exchanger plate for removing heat from the chamber and a heat transfer member for conducting heat to the heat exchanger plate The heat transfer member comprises a lower heat conduction surface bonded to an external surface of the chamber and an upper heat transmitting surface thermally coupled to the heat exchanger plate Preferably, the temperature control assembly comprises a heater for heating the chamber and a computer control system for regulating the heat removed by the heat exchanger plate as well as the heat supplied by the heater to maintain the chamber at substantially uniform temperatures.

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Sunnyvale, CA, United States of America

Eric Farahmand E Askarinam