Micro-Controle-Spectra Physics

Micro-Controle Spectra-Physics S.a.s.

Newport Corporation

Eric Durand

Bruno Rety

Joel Mendes Pereira

Roger Desailly

Alain Jeanne

Franck Duquenoy

A piezoelectric inertia actuator is disclosed herein, which includes an actuator body, a coupling body defining a receiver, a lock body positioned within the receiver, and a piezo body attached to the coupling body. At least one flexible frame configured to support an engaging body may extend from the piezo body. A spring blade configured to apply a preload force to the engaging body via a decoupling preload body may extend from the coupling body. A tension member may be positioned within the lock body and apply a preload force to the piezo body, thereby creating a net compressive stress therein. The piezoelectric inertia actuator may further include a piezo preload body configured to apply a reaction force to the piezo body in order to maintain the compressive stress therein. The preload applied to the piezo body may be substantially decoupled from the preload applied to the engaging body.

Piezoelectric inertia actuator

The invention relates to a system () for moving a support plate (), the support plate () being, in a so-called neutral position, substantially parallel to an XY plane defined by a so-called X direction and a so-called Y direction,saidthesystem comprising at least two control stages (EE) which are superimposed in a direction Z orthogonal tosaidtheX and Y directions, the two control stages (EE) being secured to each other, at least one ofsaidthecontrol stages (EE) comprising a control module (MM), the control module (MM) comprising only movement units designed so as to each generate a translational movement in an XY plane, respectively in different directions.

System for generating the movement of a support plate in six degrees of freedom

A method for compensating for accuracy errors of a hexapod is disclosed, said hexapod comprising a base, an actuation assembly having six linear translation actuators, a control unit, and a movable carriage comprising a platform connected to the base by means of the actuation assembly. The method includes a measurement step for determining geometry and positioning errors on the hexapod, the measurement step including sub-steps for determining positioning errors of the pivot centers on the carriage and on the base, for determining length errors of the actuators and for measuring positioning errors of the actuators along the path thereof, the compensation method also including a step for calculating, from measurements taken, error compensation values and a step for applying said error compensation values to the control unit of the hexapod, during subsequent use of said hexapod.

Method and system for compensating for accuracy errors of a hexapod

The invention relates to a system () for moving a support plate (), the support plate () being, in a so-called neutral position, substantially parallel to an XY plane defined by a so-called X direction and a so-called Y direction, said system comprising at least two control stages (E, E) which are superimposed in a direction Z orthogonal to said X and Y directions, the two control stages (E, E) being secured to each other, at least one of said control stages (E, E) comprising a control module (M, M), the control module (M, M) comprising only movement units designed so as to each generate a translational movement in an XY plane, respectively in different directions.

A driving device for driving in rotation a toothed wheel, in particular a turntable, has a worm intended to mesh with the toothed wheel, a motor to drive the worm in rotation, a flexible sleeve that partially surrounds the worm in such a way as to form an assembly described as a worm/sleeve assembly, and a pre-stressing unit. The motor is arranged in a structure that is fitted pivotably relative to the worm/sleeve assembly, and the driving device also has a force transfer unit connecting the motor to the sleeve at a second extremity of the worm.

Device for driving in rotation a toothed wheel, in particular a turntable

A specimen positioning mechanism () includes a movable stage () movable along multiple axes, a plate () connected to and supporting a specimen mounting chuck (), multiple linear displacement mechanisms () coupling the plate to the movable stage and mutually spaced apart at different locations between the movable stage and the plate and separately controllable to change distances between the movable stage and the plate, and a flexible member () coupling the movable stage and the plate. The flexible member is motion compliant in three axes of motion. The flexible member in response to linear displacements of the linear displacement mechanisms allows linear and rotational movement of the specimen mounting chuck in the three axes of motion compliance.

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Amilly, France

Eric Durand