Mapper Lithography IP B.v.

Asml Netherlands B.v.

Eric De Kok

Kaustubh Prabodh Padhye

Robert Mossel

Willem Jacob Vis

Cor Verburg

Wim Vis

A measurement system for measuring an input electrical current (Ics) from a current source (CS) and generating a current measurement signal, comprising a current measuring circuit () having a first input terminal () connected to the current source and an output terminal () for providing the current measurement signal. The current measuring circuit further comprises one or more power supply terminals () arranged to receive one or more voltages from a power supply (a,b) for powering the current measuring circuit. The current measuring circuit also comprises a first voltage source (VD) coupled to the one or more power supply terminals, the first voltage source providing a disturbance voltage to the one or more power supply terminals, the disturbance voltage representing a voltage at the first input terminal.

Current measurement system

A measurement system for measuring an input electrical current (Ics) from a current source (CS) and generating a current measurement signal, comprising a current measuring circuit () having a first input terminal () connected to the current source and an output terminal () for providing the current measurement signal. The current measuring circuit further comprises one or more power supply terminals () arranged to receive one or more voltages from a power supply () for powering the current measuring circuit. The current measuring circuit also comprises a first voltage source (VD) coupled to the one or more power supply terminals, the first voltage source providing a disturbance voltage to the one or more power supply terminals, the disturbance voltage representing a voltage at the first input terminal.

A capacitive measurement system for generating a measurement signal representative of a measured position or distance to a target. The system has a first circuit comprising a thin film capacitive sensor () arranged for providing a sensor capacitance in dependence on the measured position or distance; a cable () comprising a sensor wire () and a co-axial shield conductor (), the cable having a remote end and a local end, the sensor wire electrically connected to the capacitive sensor at the local end of the cable; a voltage source () having an output terminal connected to the sensor wire at the remote end of the cable and arranged to energize the capacitive sensor, and energize the shield conductor with essentially the same voltage as the sensor wire; and a current measuring circuit () having first and second input terminals and an output terminal, the current measuring circuit connected in series with the first input terminal connected to the output terminal of the voltage source and the second input terminal connected to the sensor wire at the remote end of the cable, the current measuring circuit arranged to measure current flowing in the sensor wire and generate the measurement signal at the output terminal.

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Nootdorp, Netherlands

Eric De Kok