Texas Instruments Corporation

Eric D Rullan

Mark R Visokay

Mahalingam Nandakumar

Donald L Plumton

Tae S Kim

Gregory Boyd Shinn

Douglas A Prinslow

Stanton Petree Ashburn

Abha Singh Kasper

Harold C Waite

Daniel Lee Corum

A method of limiting plasma charging damage on ICs. A die includes gate stacks on active areas defined by a field dielectric. A pre-metal dielectric (PMD) layer is over the gate electrode. A contact masking material pattern is defined on the PMD layer including first contact defining features for forming active contacts and second contact defining features for forming dummy contacts (DC's) including over active areas and gate electrodes. Contacts are etched through the PMD layer using the contact masking material pattern to form active contacts and DC's. A patterned metal 1 (M1) layer is formed including first M1 portions over the active contacts and dummy M1 portions over the DC's. Metallization processing follows including forming interconnects so that the active contacts are connected to MOS transistors on the IC, and the DC's are not electrically connected to the MOS transistors.

Dummy contacts to mitigate plasma charging damage to gate dielectrics

Methods and devices for mapping logical addresses to physical locations on an integrated circuit die are disclosed herein. An embodiment of the method includes fabricating a die, where the die has a plurality of bits that are electrically accessible by way of logical addresses. A plurality of bits have known defects that form a predetermined fault pattern at a predetermined location on the die. The bits are tested by using the logical addresses, wherein the testing yields data as to the functionality of the bits. The test results are searched for the predetermined fault pattern. The physical locations of the defective bits constituting the predetermined fault pattern are correlated with their logical addresses based on the location of the predetermined fault pattern.

Methods and devices for determining logical to physical mapping on an integrated circuit

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Allen, TX, United States of America

Eric D Rullan