United Microelectronics Corp.

Other

Eric Chu

Tien-Jui Liu

Ling-Hsin Tseng

Kevin Chiang

Tony Chen

Ken Yew

Peter Y Lin

Hung-Hsien Chang

To-Yao Hsu

Chin-Wen Chung

Hsing-Sheng Yang

The present invention relates to a cooling system of a furnace, and more particularly, to a multi-cycle cooling system, located by the furnace door. The multi-cycle cooling system comprises the first gas cooling cycle, the second gas cooling cycle, the first liquid cooling cycle, the second liquid cooling cycle, the heat sinks and the heat insulation slot. When inside the process tube proceeds the high temperature process like depositing process, the first gas cooling cycle and the second gas cooling cycle are opened and the second liquid cooling cycle is closed at the same time. The second gas cooling cycle and the second liquid cooling cycle are assembled in the first flange, which is located on the process tube and contacts with the door. The first liquid cooling cycle in the second flange, which is located on the process tube and contacts with the first range, is always opened. When inside the process tube not proceeds the high temperature process, the first gas cooling cycle and the second gas cooling cycle are closed and the second liquid cycle is opened at the same time. The heat sinks and the heat insulation slot are on the door to increase the heat conduction efficiency of the door and to extend the lifetime of the elements on the door. The first liquid cooling cycle and the second cooling cycle are the independent cooling systems to each other. The first flange is located between the door and the second flange.

Cooling system for reducing particles pollution

A cassette holder is positioned within cleaning equipment. The cleaning equipment includes a solution tank, at least one pipe positioned on an internal wall of the solution tank, and a cassette in which at least one semiconductor wafer is placed. The cassette holder has a loading plate in the solution tank for holding the cassette. Pluralities of guide blocks mounted on the loading plate prevent movement of the cassette. A side-frame is positioned at an end of the loading plate proximate to the pipe. The bottom of the loading plate has a plurality of neck feet, and each neck foot is covered by a first tube that enhances support strength of the neck foot. The cassette holder further includes at least one weight to overcome buoyancy.

Cassette holder for cleaning equipment

The present invention relates to a cooling system of a furnace, more particularly, to a multi-cycle cooling system, located by the furnace door. The probability of pollution by particles can be decreased and the lifetime of the furnace devices can be extended by using different liquid and gas cycles, cooling the different steps the semiconductor processes in the furnace.

A drafting apparatus in a furnace. A buffer board having a plurality of gas intakes is disposed in a front end of the drafting apparatus. A laminar flow board having a plurality of gas outtakes is disposed in a rear end of the drafting apparatus. A drafting region is enclosed by the drafting apparatus. The drafting region comprises at least one drafting board to draft and redirect the gas flow. A laminar flow is then obtained to flow through the outtakes on the laminar board.

Drafting apparatus

An apparatus for loading wafers into horizontal quartz tube, the apparatus includes a base plate, holding plate, trolley main body and two supporting bases. The base plate has a plurality of stages, which is lifted by a loading rod and fixed atop thereon, for placing wafers. The holding plate has a plurality of fixing screws and altitude adjusting screws for supporting the base plate and changing an altitude of the base plate to match an altitude of wafer boat. The trolley main body, which supports the holding plate by supporting pillars, provides with a plurality of position holes for carrying the holding plate and moving the base plte. The two supporting bases are connected by a solid plate, whose both ends are respectively attached at hollows formed at the middle of each of the two supporting bases. The two supporting bases are provided with a pair of slide bearings on either side of the solid plate. The slide bearings are fitted with two parallel silde shafts out of the horizontal quartz tube, thereby allowing the two supporting bases to travel along the slide shaft into and out of the horizontal quartz tube. In addition, the supporting bases have several pins adapted to mate with the position holes of the trolley main body to mount the trolley main body on the solid plate, thereby allowing the wafer boat to move along with the two supporting bases.

Apparatus for loading wafers into a horizontal quartz tube

A dust remover for power sander includes a dust collecting hood secured on the sander and fluidically communicated with a vacuum system formed in or attached to the sander, having a resilient bellows portion formed on a lower portion of the hood for covering a sanding pad as driven by a motor of the sander and a bottom flange having a plurality of apertures or perforations circumferentially formed in the flange, with the bellows portion resiliently expanding to retain the bottom flange on a working surface; whereby upon vacuum suction in the sander to form at least an air stream as drafted from the outside into the inside of the hood, the dusts, as produced when operating the sander, will be sucked inwardly into the hood as laden in the air stream to be finally collected and disposed for preventing air pollution and for enhancing occupational health.

Air-drafting dust remover for power sander

A pneumatic tool includes: a main cylinder having an operating lever for on-off control for the supply of compressed air into the pneumatic tool, a barrel member resiliently coupled to the main cylinder and having a tool unit secured at its front end portion, and an automatically closed throttle valve held in the main cylinder, whereby upon touching on a working object when starting the pounding job, the barrel member will be retracted to open the throttle valve for performing the pneumatic operation by the pneumatic tool; and when subjected to no load condition, the throttle valve will be restored and closed automatically to temporarily stop the pounding of the pneumatic tool to minimize vibration hazard, and an air cushion is inherently formed between the barrel member and the main cylinder for dampening or absorbing the vibration shock of the pneumatic tool.

Shock preventive pneumatic tool as automatically shut off under no load

A riveter includes a suction device mounted on a rear portion of a rivet pulling head portion capable of exerting a Venturi effect when applying a compressed air stream in the suction device for automatically drafting any mandrel broken off from a set rivet, and a plurality of radial apertures radially formed through the jaws clamping the ratchet mandrel for purging any scraps or burrs produced by the mandrel clamped and pulled by the riveter for cleanliness of the jaws for preventing malfunction of the jaws.

Growing community of inventors

Hsin-Chu, Taiwan

Eric Chu