Taiwan Semiconductor Manufacturing Comp. Ltd.

Microtek Lab, Inc.

Eric Chen

Wen-Ting Chu

Yu-Hsiung Wang

Hsien-Wei Chin

Yu-Liang Lin

Snap Wang

Ming-Der Chen

Robert C Hsieh

James Wu

An apparatus to detect a liquid in a wafer processing device includes a first conductor proximate the wafer processing device. The apparatus includes a second conductor spaced apart from the first conductor and proximate the wafer processing device. The apparatus includes a liquid absorption material surrounding the first conductor and the second conductor. The apparatus includes a current source coupled to the first conductor. The apparatus includes a current detector coupled to at least one of the first conductor or the second conductor. The liquid absorption material establishes a conductive pathway between the first conductor and the second conductor when the liquid absorption material absorbs the liquid in the wafer processing device. A current is generated, by the current source, in at least one of the first conductor or the second conductor through the conductive pathway. The current detector detects the current.

Liquid detection apparatus and method of detecting liquid in wafer processing device

A method for making a semiconductor device by reshaping a silicon surface with a sacrificial layer is presented. In the present invention the steps of forming a sacrificial dielectric layer and removing the sacrificial dielectric layer are repeated multiple times in order to remove sharp edges from the silicon surface near the field oxides. Another aspect of the present invention includes making a MOSFET transistor that incorporates the forming and removing of multiple sacrificial layers into the process.

Method for reshaping silicon surfaces with shallow trench isolation

An apparatus for adjusting a minimum liquid level in a liquid supply bottle that utilizes a novel height adjustment means and a method for utilizing such apparatus are provided. In the apparatus, a height adjustment means that is positioned on a base frame of a bottle station for supporting a liquid supply bottle is used. The height adjustment means includes two sliding blocks each having a right-angled triangular cross-section slidingly engaging each other on their hypotenuses. The two sliding blocks may be driven by two screws each threadingly engaging one of the side frames for pushing (or pulling) the sliding blocks toward (or away from) each other such that an elevation of the bottle can be increased (or decreased). The present invention novel apparatus further utilizes a bottle clamp which frictionally engaging the liquid supply bottle and hold it in place while allowing the bottle be moved up and down by slidingly engaging a vertical arm of the clamp with a side frame on the bottle station.

Method and apparatus for adjusting minimum liquid level in a liquid

The present invention relates to a method enabling real-time conversion of the analog video signals from a charge coupled element into digital half-tone data which can be printed on a printer or displayed on a display screen and to a converting device which is developed for use with such method. The method according to the present invention serves six primary functions as follows:

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Hsinchu, Taiwan

Eric Chen