Brewer Science, Inc.

Eric Calderas

Kui Xu

Mary Ann Hockey

Daniel Sweat

Megan Bennett

Richard Elsworth Daugherty, Jr

Novel block copolymers ('BCPs') having non-random distributions of comonomers within at least one of the blocks and methods of using those BCPs in directed self-assembly ('DSA') processes are provided. The non-random (e.g., gradient-creating) distributions can be customized in order to concentrate the desired comonomer properties in predetermined areas of the BCP. These BCPs can achieve perpendicular orientation with simple annealing and offer superior long-range ordering and lower defectivity when compared to prior art BCPs. These BCPs can be incorporated into compositions that simultaneously offer the benefits of high-&#x3c7; and rapid thermal-annealing kinetics while maintaining similar or improved guide process windows when compared to prior art BCPs.

Gradient block copolymers for directed self-assembly

Compositions for directed self-assembly (DSA) patterning techniques are provided. Methods for directed self-assembly are also provided in which a DSA composition comprising a block copolymer (BCP) is applied to a substrate and then self-assembled to form the desired pattern. The block copolymer includes at least two blocks and is selected to have a high interaction parameter (&#x3c7;). The BCPs are able to form perpendicular lamellae by simple thermal annealing on a neutralized substrate, without a top coat. The BCPs are also capable of micro-phase separating into lines and spaces measuring at 10 nm or smaller, with sub-20-nm Lcapability.

Growing community of inventors

Rolla, MO, United States of America

Eric Calderas