Applied Materials, Inc.

Eric B Britcher

Dmitry Lubomirsky

Michael Xiaoxuan Yang

Tetsuya Ishikawa

Alexander N Lerner

Ming Xi

Son Truong Nguyen

Arulkumar P Shanmugasundram

Anh Ngoc Nguyen

Allen L D'Ambra

Henry Ho

Lily L Pang

Yeuk-Fai Edwin Mok

Russell C Ellwanger

Bernardo Donoso

Yevgeniy Rabinovich

Ricardo Martinez

Svetlana Sherman

Y Sean Lin

Leonard Giarto

Embodiments of the invention generally provide an electrochemical plating system. The plating system includes a substrate loading station positioned in communication with a mainframe processing platform, at least one substrate plating cell positioned on the mainframe, at least one substrate bevel cleaning cell positioned on the mainframe, and a stacked substrate annealing station positioned in communication with at least one of the mainframe and the loading station, each chamber in the stacked substrate annealing station having a heating plate, a cooling plate, and a substrate transfer robot therein.

Multi-chemistry plating system

Embodiments of the invention provide a liquid delivery system. The liquid delivery system generally includes a plurality of vessels flexibly coupled to a frame to provide vibration isolation therefrom. In one embodiment, the liquid delivery system includes tubing coupling liquids to/from the plurality of vessels, wherein the tubing is selected to minimize the transmission of mechanical noise to the plurality of vessels. In another embodiment, the liquid delivery system includes a controller adapted to monitor and control the delivery of the liquids throughout the system. In another embodiment, a method is provided to deliver liquids from storage vessels to substrate processing systems. Generally, the liquid delivery is completed using a first delivery step and a second delivery step wherein the amount of liquid delivered during the second delivery step is determined using the amount of liquid delivered from the first delivery step and controller by time to minimize the impacts of signal noise and delivery delay.

Liquid delivery system and method

Growing community of inventors

Rancho Cucamonga, CA, United States of America

Eric B Britcher