Macronix International Co., Ltd.

International Business Machines Corporation

Erh-Kun Lai

Hsiang-Lan Lung

Kuang Yeu Hsieh

ChiaHua Ho

Hang-Ting Lue

Yen-Hao Shih

Kuang-Yeu Hsieh

Chia-Hua Ho

Dai-Ying Lee

Wei-Chih Chien

Ying-Tso Chen

Feng-Min Lee

Ming-Daou Lee

Ming-Hsiu Lee

Tzu-Hsuan Hsu

Yu-Ping Huang

Chien-Hung Liu

Kuo-Pin Chang

Jung-Yu Hsieh

Hsin-Huei Chen

Shih-Hung Chen

Shyi-Shuh Pan

Shou-Wei Huang

Kuang-Hao Chiang

Shou-Wei Hwang

Yi-Chou Chen

Chung H Lam

Chao-I Wu

Po-Hao Tseng

Yu-Hsuan Lin

Yu-Yu Lin

Bipin Rajendran

Guan-Ru Lee

Chun-Min Cheng

Shih-Chin Lee

Kent Kuohua Chang

Szu-Yu Wang

Wen Jer Tsai

Ling-Wu Yang

Ming-Hsiang Hsueh

Chiao-Wen Yeh

Tien Fan Ou

Shou Wei Huang

Min-Ta Wu

Shih-Chih Lee

Ying Tzoo Chen

Matthew Joseph Breitwisch

Edward William Kiewra

Chih-Hsiang Yang

Ming-Chung Liang

Wei-Chen Chen

Yi-Hsuan Hsiao

Tien-Yen Wang

Chia-Wei Wu

Ming Hsiu Lee

Shih-Chang Tsai

Chi-Pin Lu

An-Chyi Wei

Guanru Lee

Chia-Jung Chiu

Hsuan Ling Kao

Jiann-Jen Chiou

Chieh Lo

Chih-Chieh Yu

Chien Hung Yeh

Chien-Hung Yeh

Shin-Chin Lee

Jen-Ren Hung

Shyi Shuh Pan

An integrated circuit structure includes a substrate, an interconnect stack, a first memory array, and a source line. The interconnect stack is over the substrate. The first memory array is over the interconnect stack and includes memory elements stacked in a vertical direction each comprising a conductive layer. The first memory array further includes a memory layer electrically connecting to the conductive layers of the memory elements and extending downwardly from a topmost one of the conductive layers to a lowermost one of the conductive layers; and a channel layer extending along a sidewall of the memory layer. The source line is in contact with a top end of the channel layer and laterally extends across the first memory array.

Memory device and method for forming the same

A memory device includes a substrate, a first conductive stripe disposed on the substrate and extending along a first direction, a second conductive stripe disposed on the first conductive stripe, a first pillar element and a spacer. The second conductive stripe extends along a second direction intersected with the first direction. A thickness of the second conductive stripe is greater than a thickness of the first conductive stripe, and the second conductive stripe is an integral structure. The first pillar element is disposed at an intersection between the first conductive stripe and the second conductive stripe, and extends from a top surface of the first conductive stripe to a bottom surface of the second conductive stripe along a third direction intersected with the first direction and the second direction. The first pillar element includes a switching layer and a memory layer corresponding to a first level.

Memory device and method for manufacturing the same

An inductor structure and a manufacturing method for the same are provided. The inductor structure includes conductive layers and conductive elements. The conductive layers overlap in a vertical direction. Each of the conductive elements is coupled between two conductive layers of the conductive layers.

Inductor structure and manufacturing method for the same

A memory device and a method for manufacturing the memory device are provided. The memory device includes a stack and a plurality of memory strings. The stack is disposed on the substrate, and the stack includes a plurality of conductive layers and a plurality of insulating layers alternately stacked. The memory strings pass through the stack along a first direction, wherein a first memory string in the memory strings includes a first conductive pillar and a second conductive pillar, a channel layer, and a memory structure. The first conductive pillar and the second conductive pillar respectively extend along the first direction and are separated from each other. The channel layer is disposed between the first conductive pillar and the second conductive pillar. The memory structure surrounds the second conductive pillar, and the memory structure includes a resistive memory material.

Method for manufacturing memory device

A semiconductor structure is provided. The semiconductor structure includes a substrate and a bottom dielectric layer continuously disposed on the substrate. The semiconductor structure further includes a plurality of stacks disposed on the bottom dielectric layer. Each of the stacks includes gate electrodes and semiconductor layers disposed alternately. The semiconductor structure further includes a plurality of source/drain structures disposed on the bottom dielectric layer and between the stacks. The semiconductor structure further includes a plurality of conductors landed on highest gate electrodes of the stacks.

Semiconductor structure and method for manufacturing the same

A memory device includes a stack and a plurality of memory strings. The stack is disposed on the substrate, and the stack includes a plurality of conductive layers and a plurality of insulating layers alternately stacked. The memory strings pass through the stack along a first direction, wherein a first memory string in the memory strings includes a first conductive pillar and a second conductive pillar, a channel layer, and a memory structure. The first conductive pillar and the second conductive pillar respectively extend along the first direction and are separated from each other. The channel layer is disposed between the first conductive pillar and the second conductive pillar. The memory structure surrounds the second conductive pillar, and the memory structure includes a resistive memory material.

A plurality of memory cells in a cross-point array in which the memory cell stacks in the cross-points include a switch element, a conductive barrier layer, and a confined cell structure in series, and having sides aligned within the cross-point area of the corresponding cross-point, the confined cell structure including surfactant spacers within the cross-point area having outside surfaces on a pair of opposing sides of the stack, and a body of programmable resistance memory material confined between inside surfaces of the surfactant spacers. The memory cells can be operated as multi-level cells in a 3D array.

3D memory with confined cell

A semiconductor structure is provided. The semiconductor structure includes a staircase structure including a first stair layer and a second stair layer on the first stair layer. The first stair layer comprises a first conductive film. The semiconductor structure includes a landing pad disposed on the first conductive film. The landing pad has a first pad sidewall facing toward the second stair layer, a first lateral gap distance between an upper portion of the first pad sidewall and the second stair layer is smaller than a second lateral gap distance between a lower portion of the first pad sidewall and the second stair layer.

Memory device including a landing pad with increased thickness of a conductive film in the landing area

A semiconductor structure and a manufacturing method for the same are provided. The semiconductor structure comprises a channel element. The channel element comprises a substrate portion and a vertical channel portion. The vertical channel portion is adjoined on the substrate portion. The substrate portion and the vertical channel portion both comprise single crystal silicon.

Semiconductor structure including vertical channel portion and manufacturing method for the same

A memory device and a manufacturing for the same are provided. The memory device comprises a channel line, word lines, a first switch, and a second switch. Memory cells for a memory string are defined at intersections between the channel line and the word lines. The first switch is electrically connected with the channel line. The second switch is electrically connected with the channel line. The first switch is electrically connected between the second switch and the memory cells.

Memory device with first switch and word line switches comprising a common control electrode and manufacturing method for the same

A semiconductor structure and a method for manufacturing the same are provided. The method includes: forming a silicide layer, forming a vertical Si channel layer, wherein the vertical Si channel layer is on an upper surface of the silicide layer, the vertical Si channel layer has a first silicon phase; performing a first annealing step so as to move the silicide layer upward and change a solid phase of the vertical Si channel layer from the first silicon phase to a second silicon phase at an interface of the silicide layer and the vertical Si channel layer, wherein the second silicon phase has a conductivity higher than a conductivity of the first silicon phase.

Semiconductor structure and a method for manufacturing the same

A memory device comprises a stack of conductive layers, and an array of pillars through the stack. Each of the pillars comprises a plurality of series-connected memory cells located in a layout pattern of pillar locations at cross-points between the pillars and the conductive layers. The pillars in the array are arranged in a set of rows of pillars extending in a first direction. First and second source lines are disposed vertically through the pillars of first and second particular rows of pillars. The set of rows of pillars includes a subset of rows of pillars including multiple members disposed between the first source line and the second source line. A source line conductor is disposed beneath and electrically connected to the first source line, the second source line, and the subset of rows of pillars disposed between the first and second source lines.

Array of pillars located in a uniform pattern

A memory device includes a stack structure, a memory element, a channel element, and a semiconductor layer. The stack structure includes a source layer, an insulating layer and gate electrode layers. The insulating layer is on the source layer. The gate electrode layers are on the insulating layer. The memory element is on electrode sidewall surfaces of the gate electrode layers. Memory cells are defined in the memory element between the channel element and the gate electrode layers. The semiconductor layer is electrically connected between the source layer and the channel element. The semiconductor layer and the source layer have an interface therebetween. The interface is at a location on an inside of an insulating sidewall surface of the insulating layer with a lateral offset relative to the insulating sidewall surface.

Memory device with lateral offset

A three-dimensional memory device includes a substrate, a plurality of horizontal conductive layers, a plurality of vertical memory structures and a vertical conductive post. The conductive layers are located above the substrate, and immediately-adjacent two of the conductive layers are spaced by a first air gap. The memory structures pass through the conductive layers and are connected to the substrate. The conductive post is located between immediately-adjacent two of the memory structures and passes through the conductive layers and is connected to the substrate. The conductive post is spaced from immediately-adjacent edges of the conductive layers by a second air gap.

Three dimensional memory device and method for fabricating the same

A memory device comprises a plurality of stacks of bit lines alternating with insulating strips over an insulating layer on a substrate, and a plurality of vertical gate structures disposed between the stacks. Vertical channel structures and memory elements are disposed between outside surfaces of the vertical gate structures and sidewalls of insulating strips in the stacks of bit lines. The vertical channel structures provide channels between adjacent bit lines in the stacks. A plurality of word line transistors is disposed over and connected to respective vertical gate structures. A plurality of word lines is disposed over and connected to the word line transistors. The memory device comprises circuitry connected to the bit lines to apply bit line and source line voltages to the bit lines.

3D NOR memory having vertical gate structures

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Erh-Kun Lai