Applied Materials, Inc.

Eran Weiss

Jeffrey C Hudgens

Izya Kremerman

Paul Benjamin Reuter

Nir Merry

Dean C Hruzek

Travis Morey

Michael Robert Rice

Todd J Egan

Abraham Ravid

Rajkumar Thanu

Karuppasamy Muthukamatchy

Chandrakant M Sapkale

A robot apparatus may include an upper arm adapted to rotate about a first rotational axis and a forearm rotatably coupled to the upper arm at a second rotational axis. A first wrist member may be rotatably coupled to the forearm at a third rotation axis. A second wrist member may be rotatably coupled to the forearm at the third rotation axis. A first end effector may be coupled to the first wrist member and a second end effector may be coupled to the second wrist member. The first wrist member and the second wrist member may be configured to rotate about the third rotational axis between a first pitch and a second pitch as a function of extension of the robot apparatus. Other apparatus and methods are disclosed.

Robot apparatus including dual end effectors with variable pitch and methods

A load lock door assembly with side actuation is disclosed. Load lock door assembly includes a load lock door and a door support assembly coupled thereto. Door support assembly includes one or more pivot members pivotable relative to one or more sides of the load lock body, a door support bracket coupled to the load lock door, one or more separator side actuators coupled between the door support bracket being actuatable to separate the load lock door from a sealing surface, and one or more pivot side actuator operable to pivot the load lock door above or below the load lock entry. Load lock apparatus with side actuation, systems including one or more load lock door assemblies with side actuation, and methods of operating load lock door assemblies are provided, as are numerous other aspects.

Load lock door assemblies, load lock apparatus, electronic device processing systems, and methods

Load lock door assembly, load lock apparatus, electronic device processing systems, and methods

An optical calibration method and apparatus for calibration of wafer positioning within a reactor chamber under process conditions employs an array of cameras in a lid of the chamber using images of the wafer edge to locate the wafer relative to the reference feature.

Apparatus and method for optical calibration of wafer placement by a robot

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Sunnyvale, CA, United States of America

Eran Weiss