Media Lario S.r.l.

Enrico Benedetti

Fabio E Zocchi

Pietro Dario Binda

Fabio Zocchi

Pietro Binda

A collector optical system for EUV and X-ray applications is disclosed, wherein the system includes a plurality of mirrors arranged in a nested configuration that is symmetric about an optical axis. The mirrors have first and second reflective surfaces that provide successive grazing incidence reflections of radiation from a radiation source. The first and second reflective surfaces have a corrective shape that compensates for high spatial frequency variations in the far field intensity distribution of the radiation.

Grazing incidence collector optical systems for EUV and X-ray applications

A collector optical system is provided in which radiation is collected from a radiation source and directed to an image focus. The collector optical system includes one or more mirrors, with each mirror being symmetric about an optical axis extending through the radiation source and each mirror having at least first and second reflective surfaces. The first and second reflective surfaces have a common focus, such that radiation from the source undergoes successive grazing incidence reflections at the first and second reflective surface and wherein the common focus is transversely offset by a predetermined distance &#x394;r with respect to the optical axis.

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Montagna, Italy

Enrico Benedetti