Ecole Polytechnique

Centre National De La Recherche Scientifique

Horiba Jobin Yvon Sas

Enric Garcia-Caurel

Bernard Drevillon

Antonello De Martino

Denis Cattelan

A spectroscopic polarimetric system of broad spectral range, includes a light source suitable for emitting an incident light beam over a wavelength range, a polarization state generator (PSG), a polarization state analyzer (PSA), and a detector. The PSG and the PSA have respective elements for modulating the polarization of the light beam. The elements of the PSG for modulating polarization are suitable for generating a sequence ofpolarization states with m&#x3e;4 at each measurement wavelength, the elements of the PSA for modulating polarization are suitable for determining a sequence ofpolarization states with n&#x3e;4 for each measurement wavelength, and the detector elements are suitable for acquiring a sequence of N measurements with 16&#x3c;N&#x2266;n&#xd7;m at each wavelength to extract therefrom a polarimetric spectroscopic measurement of the Mueller matrix of the sample. An extended spectroscopic polarimetric measurement method is also described.

Device and method for taking spectroscopic polarimetric measurements in the visible and near-infrared ranges

A broadband ellipsometer/polarimeter system for analyzing a sample includes an illumination source emitting a polychromatic light beam, a polarization state generator (PSG) including a fixed linear polarizer and a substantially achromatic retarder mounted on a rotating holder, a sample holder, a polarization state analyser (PSA) including a fixed linear polarizer and a substantially achromatic retarder mounted on a rotating holder, a primary detection system measuring the intensities at each wavelength of the light beam transmitted through the PSA, optics to collimate the beam into the PSG and into the PSA and to focus the beam into the sample surface and the detector. The linear polarizer and achromatic retarder in the PSA are identical to those of the PSG but mounted in a reverse order.

Growing community of inventors

Paris, France

Enric Garcia-Caurel