Academia Sinica

En-Te Hwu

Ing-Shouh Hwang

Wei-Min Wang

Shao-Kang Hung

Hartmut Illers

Kuang-Yuh Huang

Hans Ulrich Danzebrink

Hsien-Shun Liao

A piezoelectric actuating device includes a carrier, at least a piezoelectric unit, at least a linked component and a moving component. The piezoelectric unit is disposed on the carrier and includes at least a piezoelectric buzzer. The linked component is disposed corresponding to the piezoelectric unit. One end of the linked component is attached to the piezoelectric buzzer. The moving component is connected with the linked component. When the piezoelectric buzzer is actuated, it can carry the linked component to move correspondingly so as to move the moving component. The piezoelectric actuating device has the advantage of low cost and can achieve the sub-nanometer scale actuating resolution.

Piezoelectric actuating device

An optical module includes at least a carrying stage, at least an actuator unit and at least an optical assembly. The carrying stage has a first aperture. The actuator unit is disposed at one side of the carrying stage and has a second aperture. The optical assembly is connected with the actuator unit, and the actuator unit adjusts the position of the optical assembly. A radiated wave enters from one side of the optical module and passes through the first aperture, the second aperture and the optical assembly. A microscope with the optical module has compact size and is easily assembled and carried. The optical module and microscope can efficiently reduce the effect of ambient temperature variations so as to improve the measuring stability thereof.

Optical module for X-ray microscope

An apparatus for actuating a positioning device includes a housing; a piezoelectric element connected to the housing; a driven element configured to move relative to the housing; and a flexible element connected to the piezoelectric element and configured to transfer a motion of the piezoelectric element to the driven element.

Friction-driven actuator

A linear actuator includes a housing, a rotary unit disposed in the housing, and a screw member driven by the rotary unit. The rotary unit is translatable relative to the housing when the screw member is driven by the rotary unit.

Linear actuator and linear actuating module having same

A system includes a displacement sensor, an actuator connected to the displacement sensor, and a feedback unit. The displacement sensor is configured to measure at least one of a relative position and a relative orientation between the displacement sensor and the target object. The feedback unit receives a signal from the displacement sensor related to the measured relative position or relative orientation and controls the actuator to move the displacement sensor on the basis of variations in the received signal arising due to a change in environmental conditions.

Alignment and anti-drift mechanism

A multi-axis actuating apparatus for a nano-positioning apparatus includes a movable element attached to a sample platform, a plurality of driving elements, and a plurality of actuators. The driving elements frictionally engage the movable element and are configured to selectively move the movable element along a first direction. The plurality of actuators move the plurality of driving elements when driving signals are applied to the plurality of actuators. Different driving signals may be applied to the plurality of actuators to cause different movement of the driving elements such that the movable element has different displacements in different directions along the plurality of driving elements. The movable element is titled due to the different displacements.

Multi-axis actuating apparatus

A system includes an objective lens, an imaging module, and a measurement module. The objective lens is configured to receive light emitted by a light source, focus the emitted light onto a target object, and receive light reflected by the target object. The imaging module is configured to receive a first portion of the reflected light. The measurement module is configured to receive a second portion of the reflected light and includes a photo detector and an astigmatic lens configured to direct the second beam onto the photo detector.

Optical imaging system

The present invention provides an optical multi-axis linear displacement measurement system and a method thereof, and the system can detect the reflected light from the top surface of the object so as to obtain multi-axis linear displacements of the object. The optical multi-axis linear displacement measurement system utilizes a non-contact optical method for obtaining multi-axis linear displacements of the object and it can perform simultaneous multi-axis linear displacement measurements. The advantages of the system and method include: high response speed (bandwidth) for dynamic measurement, simple structure, cost effective, and high sensitivity for displacement measurements.

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Taipei, Taiwan

En-Te Hwu