Gudeng Precision Industrial Co., Ltd.

En-Nien Shen

Ming-Chien Chiu

Yung-Chin Pan

Cheng-En Chung

Po-Ting Lee

Chia-Ho Chuang

Chih-Ming Lin

Kuo-Hua Lee

Wei-Chien Liu

Jyun-Ming Lyu

Tzu-Wei Huang

Jyun-Yan Jiang

Xin-Yuan Huang

Shih-Feng Wu

The invention discloses a substrate container including a shell and a cover member. The shell defines an accommodation space, and has a bottom and at least one exhaust hole formed on the bottom, wherein the exhaust hole is adjacent to an opening of the shell. The cover member is mounted to the bottom of the shell, and the cover member and the bottom of the shell define a negative pressure cavity above and communicating with the at least one exhaust hole. An elongated exhaust hole is defined above the negative pressure cavity, and communicates with the negative pressure cavity and the accommodation space. A gas in the accommodation space is exhausted sequentially from the elongated exhaust hole, the negative pressure cavity and the at least one exhaust hole.

Substrate container with built-in negative pressure cavity

A substrate container includes a container body having a storage space and an opening in communication with the storage, a door body disposed at the opening, a limiter disposed on the door body and facing the opening, a supporter disposed on one side of the storage space, and at least two elastic buffer elements tightly disposed between the door body and the limiter and between the supporter and the container body, respectively. A door assembly of a substrate container, a support assembly of a substrate container and an elastic buffer element used in a substrate container are further provided. The elastic buffer element is applied between any two rigid elements in the substrate container to provide a buffer force and an appropriate frictional force, so as to alleviate the problems of impact and dust generated between the rigid elements.

Substrate container and its door assembly, support assembly, and elastic buffer element

A supporting shelf module includes a plurality of plastic supporting plates parallelly arranged in a height direction, and at least one pair of metal-made connectors located at two opposite ends of the supporting plates in the height direction. The connectors in one pair are correspondingly located in two horizontal planes perpendicular to the height direction. A wafer container is also disclosed, which includes a container body having at least two sets of the supporting shelf modules mounted therein, at least two top retaining brackets and at least two bottom retaining grooves provided on an inward side of a top and a bottom panel of the container body, respectively. The supporting shelf module has upper ends engaged with the top retaining brackets and lower ends engaged with and limited to the bottom retaining grooves in an engaging direction. Thus, the tolerance problem of the conventional wafer shelf can be solved.

Supporting shelf module and wafer container using same

A substrate container with enhanced flow field therein includes a box, at least one offset inflation mechanism and at least one gas diffusion mechanism. The offset inflation mechanism is disposed outside internal receiving space of the box. The offset inflation mechanism has a gaseous chamber extending in the same direction as a bottom panel. The gas diffusion mechanism includes a base, a partition wall and at least one diffusion member. The base masks an outlet of the gaseous chamber to form an auxiliary gaseous chamber. The partition wall extends perpendicularly to the bottom panel to form a vertical first gas channel in communication with the auxiliary gaseous chamber. The diffusion member and the partition wall together define a second gas channel. The partition wall has at least one gap whereby the first gas channel and the second gas channel are in communication with each other.

Substrate container with enhanced flow field therein

The present invention discloses a shielding jig which mainly comprises an adjustment unit, a positioning unit and a sealing unit. The adjustment unit is configured and engaged between the positioning unit and the sealing unit. Therefore, a first actuation surface of the adjustment unit matches with a second actuation surface of the sealing unit, resulting in expansion of the sealing unit. This expansion makes the shielding jig be able to shade and seal any workpiece.

Shielding jig

A central support device for supporting plate-shaped objects and a storage apparatus for storing the plate-shaped objects are provided and adapted to regulate the heights of support elements and confine front ends thereof to a specified range. The central support device includes a casing, the support elements and height adjustment elements. Partition portions each having a dent portions are disposed at the casing and arranged in the heightwise direction, with a support element receiving slot defined between every two adjacent partition portions. Bottom sides of the dent portions slope in the heightwise direction. One end of each support element is connected to a bottom portion of a corresponding support element receiving slot. The height adjustment elements are disposed in the dent portions, respectively, and extend in the heightwise direction to form top ends for supporting the support elements. The storage apparatus also includes the central support device.

Growing community of inventors

Taipei, Taiwan

En-Nien Shen