Leybold Aktiengesellschaft

Leybold Optics Gmbh

Emmerich Novak

Stefan Kempf

Jaroslav Zejda

Friedrich Anderle

Jutta Trube

Reiner Seiler

Dan L Costescu

In an apparatus for the automatic casting, coating, varnishing, inspecting and sorting of workpieces--especially of optical or magneto-optical data storages--with at least one transport apparatus advancing the substrates from a production station to the processing stations, and with a stacking station for the separate stacking of workpieces that are finished and have been found perfect and workpieces containing defects, a substrate transporting apparatus is provided which has a transport carriage (3) which can be moved back and forth along a straight line and has three transport arms (4,4',4'';5,5',5'') bearing substrate holders (6, 6',6'';7,7',7'') on each side of the carriage. Furthermore, on the one side of the transport carriage (3) there is provided a vacuum coating apparatus (8) and a stacking apparatus (10, 11) disposed on the other side of the transport carriage, and furthermore an apparatus for quality testing (9) and a carousel transport apparatus (13) disposed opposite the injection molding machine (12) in the direction of movement of the transport carriage and having various varnishing, drying, printing, print inspecting and substrate centering apparatus (14 to 19) disposed on its circumference.

Apparatus for the automatic casting, coating, varnishing, testing and

A rotatable substrate holder (6) which has a plurality of substrate pickups in a circular arrangement at equal distances apart is disposed in a vacuum chamber (1). A corresponding number of substrates are driven stepwise on a circular path from an air lock station (8, 9) through at least one coating station (10, 11) to the air lock station. To increase the throughput of substrates, the vacuum chamber (1) has two air lock stations (8, 9) and two coating stations (10, 11) one following the other. The step size of the drive (36) on the one hand, and the angular position of each coating station (10 and 11, respectively) with respect to the air lock station associated with it (8 and 9, respectively) with reference to the axis of rotation of the substrate holder (6) on the other hand, are selected such that one and the same coating station (10 and 11, respectively), through the step-wise movement of a particular substrate pickup (63), is associated in each case with one and the same air lock station (8 and 9, respectively).

Apparatus on the carousel principle for coating substrates

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Obertshausen, Germany

Emmerich Novak