Alcatel Lucent

Alcatel

Pfeiffer Vacuum Gmbh

Emmanuelle Veran

Jean-Pierre Desbiolles

Gloria Sogan

Erwan Godot

Erwan Godol

Sébastien Munari

The goal of the present invention is to provide an apparatus capable of cooperation with at least one piece of wafer processing equipment. The apparatus is connected to a first equipment via a first opening, to a wafer transport case via a second opening and to a second piece of equipment via a third opening. The apparatus is capable of removing a basket of parallel stacked trays of wafers from a wafer transport case. The apparatus is capable of placing and supporting the wafers in order to move them to the first equipment through the second opening and to the second piece of equipment through the third opening.

Apparatus for loading and unloading semiconductor substrate platelets

The cryogenic trap of the invention comprises, in a hollow body () having an access valve () and an outlet valve (), a cold core () associated with a plate () having low thermal inertia and movable between a trapping position in contact with the cold core (), and a regeneration position spaced apart from the cold core () and in contact with a heater ring (). The plate () is in contact with gases to be trapped, and prevents them from passing to the cold core (). Regeneration requires heating only of the plate () carrying the condensed and solidified gases, and it is therefore more rapid.

Rapidly regenerating cryogenic trap

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Annecy, France

Emmanuelle Veran