Motorola Corporation

Emmanuel Scheid

Myriam Combes

Jean-Paul Guillemet

Jean Michel Reynes

Stephane Astie

Andre Peyre-Lavigne

Danielle Bielle Daspet

An electronic device comprises a semiconductor substrate (2) having a cavity (32) extending into the substrate (2), a membrane (8) formed over the semiconductor substrate so as to extend across the cavity (32) in the semiconductor substrate and an active region (14, 30) supported by the membrane (8) and positioned adjacent the cavity (32). The membrane (8) comprises a single dielectric layer formed of an oxy-nitride material.

Electronic device and method for forming a membrane for an electronic

A semiconductor fuse device is formed of a conductive semiconductor substrate (11) having a top surface and a bottom surface. A layer (12) of dielectric material is provided on a portion of the top surface and a first conductive layer (15) is formed wholly on a first portion of the layer (12) of dielectric material and forms a first contact of the device. A second conductive layer (14) is formed on a second portion of the layer (12) of dielectric material spaced from the first portion and extends to contact the top surface of the substrate (11). A fuse portion (16) is formed wholly on the layer (12) of dielectric material and extends between and in electrical contact with the first and second conductive layers (14, 15). The bottom surface of the substrate (11) provides a second contact of the device, so that only one wire bond is necessary.

Semiconductor fuse devices

Growing community of inventors

Corronsac, France

Emmanuel Scheid