Icos Vision Systems Nv

Nano-or Technologies (israel) Ltd.

Emmanuel Lanzmann

Yoel Arieli

Shay Wolfling

Yoram Saban

Shay Levavi

Gavriel Feigin

Tal Kuzniz

David Banitt

Yosi Weitzman

Methods and apparatus to perform wavefront analysis, including phase and amplitude information, and 3D measurements in optical systems, and in particular those based on analyzing the output of an intermediate plane, such as an image plane, of an optical system. Measurement of surface topography in the presence of thin film coatings, or of the individual layers of a multilayered structure is described. Multi-wavelength analysis in combination with phase and amplitude mapping is utilized. Methods of improving phase and surface topography measurements by wavefront propagation and refocusing, using virtual wavefront propagation based on solutions of Maxwell's equations are described. Reduction of coherence noise in optical imaging systems is achieved by such phase manipulation methods, or by methods utilizing a combination of wideband and coherent sources. The methods are applied to Integrated Circuit inspection, to improve overlay measurement techniques, by improving contrast or by 3-D imaging, in single shot imaging.

Methods and apparatus for wavefront manipulations and improved 3-D measurements

A method of wavefront () analysis including applying a transform to the wavefront, applying a plurality of different phase changes () to the transformed wavefront (), obtaining a plurality of intensity maps () wherein the plurality of different phase changes are applied to region of the transformed wavefront, corresponding to a shape of the light source.

Spatial wavefront analysis and 3D measurement

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Tel Aviv, Israel

Emmanuel Lanzmann