Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

Commissariat a L'energie Atomique

Freescale Semiconductor,inc.

Stmicroelectronics (crolles 2) Sas

Commissariar Á L'energie Atomique at Aux Energies Alternatives (cea)

Nxp Usa, Inc.

Emmanuel Defay

Francois Perruchot

Laurent Clavelier

Patrice Rey

Lianjun Liu

Ghislain Despesse

Bernard Diem

Alexandre Reinhardt

Vincent Larrey

Sergio P Pacheco

François Perruchot

Chrystel Deguet

Gwenael Le Rhun

Guy-Michel Parat

Gwenaël Le Rhun

Marc Aid

Neil Mathur

Hubert Moriceau

Jean-François Mainguet

Bruno Imbert

Jean-Sébastien Danel

Jean-Baptiste David

Sébastien Boisseau

Matthieu Cueff

Sebastien Boisseau

Aurélien Suhm

Serge Blonkowski

Mathieu Pijolat

Bruno Charrat

Bouhadjar Ahmed Seddik

Aude Lefevre

Eric Fribourg-Blanc

Julie Abergel

Christophe Billard

Alain Chambron

Pierre-Patrick Lassagne

Nicolas Sarrut-Rio

Brice Ivira

Julie Guillan

Xiaohong Zhu

Sohini Kar-Narayan

Jordane Soussi

This invention relates to an electromechanical actuator comprising a support and a deformable element comprising a portion anchored to at least one anchoring zone of the support and mobile portion, the deformable element comprising an electro-active layer, a reference electrode arranged on a first face of the electro-active layer an actuating electrode arranged on a second face, opposite the first face, of the electro-active layer comprises a capacitive device for measuring the deformation of the deformable element, said device being at least partially formed by a capacitive stack comprising a measuring electrode on the second face of the electro-active layer, a measuring portion of the reference electrode located facing the measuring electrode, and a portion of the electro-active layer inserted between the measuring electrode.

Electromechanical actuator

A module for warming and, alternately, for cooling, this module comprising an electrocaloric capacitor, an electrical energy storage device and a controllable circuit for transferring electrical energy between the electrocaloric capacitor and the energy storage device. The controllable circuit comprising an inductor connected between the electrocaloric capacitor and the storage device and at least one controllable switch. There is further included a unit programmed to control the switch so as to cause the transfer circuit to toggle successively into the following states and in the following order: an energy recovery state, a disabled state in which it electrically isolates the electrocaloric capacitor and the energy storage device, an energy release state and the disabled state, and each time to maintain the transfer circuit in the disabled state for a duration greater than a predetermined threshold.

Module for warming and, alternately, for cooling

An integrated capacitor comprises a layer of dielectric material known as functional dielectric material based on crystallized material of perovskite type, between at least one first electrode known as a bottom electrode at the surface of a substrate and at least one second electrode known as a top electrode, said electrodes being electrically insulated by a layer of electrically insulating material in order to allow at least one contact on the top electrode. The electrically insulating material is made of an amorphous dielectric material of perovskite type having a dielectric constant lower than that of the crystallized material of perovskite type. The contact is formed from an etched contacting layer in contact with the electrically insulating dielectric layer level with its surface parallel to the plane of the layers. A process for manufacturing such an integrated capacitor is also provided.

Integrated capacitor comprising an electrically insulating layer made of an amorphous perovskite-type material and manufacturing process

The invention relates to a process for forming a lead-based ceramic oxide dielectric material comprising at least one pyrochlore crystalline phase, which process comprises the following steps: a) a step of depositing at least one amorphous layer of said lead-based ceramic oxide material on a substrate; and b) a crystallization annealing step carried out on said amorphous layer at a temperature not exceeding 550&#xb0; C., by means of which a lead-based ceramic oxide dielectric material comprising at least one pyrochlore phase is obtained. Application to the fabrication of capacitors on integrated circuits.

Process for forming a ceramic oxide material with a pyrochlore structure having a high dielectric constant and implementation of this process for applications in microelectronics

A method for limiting temperature variation of an electrical component includes detecting a switch from passive to active states and, in response, varying a potential difference between capacitor electrodes from a first value to a second value, the electrodes being mechanically and electrically insulated from each other by a layer of electrocaloric dielectric, and in response to detecting a switch from active to passive states, varying the potential difference between the electrodes from the second to the first value.

Method for limiting the variation in the temperature of an electrical component

A device comprises at the input a first component (PA) having a first output impedance (Z), at the output a second component (ANT) having a second input impedance (Z), and an impedance-matching network between said first and second components. Because the first and/or the second impedance vary/varies, said impedance-matching network comprises a filter (F), with an impedance that is matchable to the first and second impedances, located between said first and second components and comprising at least two acoustic wave coupled resonators. At least one of the resonators comprises a perovskite type material and means for applying a voltage to said resonator, which enable the permittivity and the impedance thereof to be varied.

Device for impedance matching a component, comprising a filter having matchable impedance, based on a perovskite type material

In a process for fabricating a membrane, including, on a substrate, a thin-film multilayer including a film of piezoelectric material placed between a top electrode film and a bottom electrode film and an elastic film supporting said piezoelectric film, the process includes: determining at least one concavity/convexity curvature of said membrane along an axis parallel to the plane of the films so that at least one inflection point is defined, said point allowing a first region and a second region, corresponding to a concave part and a convex part or vice versa, to be isolated; depositing, on the surface of the substrate, a thin-film multilayer including at least one film of piezoelectric material, one bottom electrode film and one top electrode film; and structuring at least one of the electrode films to define at least said first membrane region, in which an electric field perpendicular to the plane of the films may be applied, and at least said second region, in which an electric field parallel to the plane of the films may be applied.

Process for fabricating an optimally-actuating piezoelectric membrane

An acoustic wave device comprising at least one surface acoustic wave filter and one bulk acoustic wave filter, the device including, on a substrate comprising a second piezoelectric material: a stack of layers including a first metal layer and a layer of a first monocrystalline piezoelectric material, wherein the stack of layers is partially etched so as to define a first area in which the first and second piezoelectric materials are present and a second area in which the first piezoelectric material is absent; a second metallization at the first area for defining the bulk acoustic wave filter integrating the first piezoelectric material, and a third metallization at the second area for defining the surface acoustic wave filter integrating the second piezoelectric material.

Acoustic wave device including a surface wave filter and a bulk wave filter, and method for making same

An electromechanical device having a resonator using acoustic waves propagating laterally within a piezoelectric plane resonant structure and electrodes on a face of said structure. The resonant structure comprises: a transduction region having a transduction length and generating acoustic waves; a free propagation region for the acoustic waves, adjacent to the transduction region and defined the plane of the transduction region; the resonant structure length being equal to an integer number of half-wavelengths, the resonance frequency of said resonator equaling the average propagation velocity of the wave within the structure divided by said wavelength, to adjust the quality factor of the resonator fixed by the length of the resonant structure and the coupling coefficient fixed by the ratio of the transduction length over the length of the resonant structure; the resonant structure defined by the assembly of the transduction region and the propagation region being laterally bounded by reflection regions.

Acoustic wave electromechanical device comprising a transduction region and an extended cavity

A transducer for transducing time-related temperature variations into a difference in potentials includes an upper conductive electrode designed to be exposed to a time-related temperature variation to be measured, a lower conductive electrode, and at least one layer of pyroelectric material based on a III-V nitride directly interposed between the upper and lower conductive electrodes to generate, between the upper and lower conductive electrodes, a difference in potentials corresponding to the temperature variation even in the absence of external mechanical stress.

Time-related temperature variation transducer, electronic chip incorporating this transducer and method of fabrication of this chip

An apparatus for converting vibratory mechanical energy into electrical energy includes a mobile mass, a support, first and second beams, the second being piezoelectric, and a junction element. The first beam extends longitudinally between the support and the mass, each of which has a beam end embedded therein. The second beam links the support and the mobile mass. Its elongation stiffness is lower than that of the first beam. The junction element extends between the beams. A first assembly, with a first bending stiffness, comprises the first beam, the second beam, and the junction element. A second assembly consists of the first assembly minus the second beam. Its bending stiffness is less than or equal to half of that of the first assembly.

Optimized device for converting mechanical energy into electrical energy

A micro or nano electromechanical transducer device formed on a semiconductor substrate comprises a movable structure which is arranged to be movable in response to actuation of an actuating structure. The movable structure comprises a mechanical structure having at least one mechanical layer having a first thermal response characteristic, at least one layer of the actuating structure having a second thermal response characteristic different to the first thermal response characteristic, and a thermal compensation structure having at least one thermal compensation layer. The thermal compensation layer is different to the at least one layer and is arranged to compensate a thermal effect produced by the mechanical layer and the at least one layer of the actuating structure such that the movement of the movable structure is substantially independent of variations in temperature.

Electromechanical transducer device and method of forming a electromechanical transducer device

A process for fabricating an acoustic wave resonator comprising a suspended membrane comprising a piezoelectric material layer, comprises the following steps: production of a first stack comprising at least one layer of first piezoelectric material on the surface of a first substrate; production of a second stack comprising at least one second substrate; production of at least one non-bonding initiating zone by deposition or creation of particles of controlled sizes leaving the surface of one of said stacks endowed locally with projecting nanostructures before a subsequent bonding step; direct bonding of said two stacks creating a blister between the stacks, due to the presence of the non-bonding initiating zone; and, thinning of the first stack to eliminate at least the first substrate.

Process for fabricating an acoustic wave resonator comprising a suspended membrane

An electrical component comprises a lead-based perovskite crystal material layer between a lower electrode on the surface of a substrate and an upper electrode, characterized in that the lower electrode comprises a stabilizing first layer made of a first material and a seeding second layer made of a second material, the first and second materials having the same chemical composition but different structural parameters and/or densities. A process for fabricating a component is also provided, in which the material with a perovskite structure may be PZT with a (100) or (111) orientation.

Electrical component comprising a material with a perovskite structure and optimized electrodes and fabrication process

A device for detecting elements in a fluid environment includes at least one acoustic resonator having a surface designed for fixing of elements. The resonator is configured for generating and measuring Lamb waves fostering generation of symmetrical Lamb waves. The device analyzes the resonance frequency of the resonator to determine the variation of the resonance frequency of the symmetrical Lamb waves representative of the presence of the elements.

Device and method for detecting elements in a fluid environment

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Voreppe, France

Emmanuel Defay