General Electric Company

Intel Corporation

Emily Yixie Shu

Weiping Wang

Louis Jacob Petrucco

Thomas Huei Hwang

Wolfgang Daum

Dale M Brown

Sandra F Feldman

Christopher Donald Johnson

Michael Evans Graham

Robert J Dunki-Jacobs

Michael Kent Cueman

John Yupeng Gui

Charles Richard Evans

Jeffery Allan Lovett

Meng-Ling Hsiao

Richard Alan Ridilla

Joseph James Salvo

George K Chen

Donald R Berdahl

Harold W Tomlinson

Goutam Paul

Dale Marius Brown

In an embodiment of the invention, an apparatus includes a reticle having a frontside including a pattern to be imaged onto a semiconductor wafer, a thin film located over a backside of the reticle to form a global convex shape and to reduce friction when sliding on a chuck, and the chuck having a topside to which the backside of the reticle conforms.

Controlling shape of a reticle with low friction film coating at backside

An apparatus for detecting flashback occurrences in a premixed combustor system having at least one fuel nozzle includes at least one photodetector and at least one fiber optic element coupled between the at least one photodetector and a test region of the combustor system wherein a respective flame of the fuel nozzle is not present under normal operating conditions. A signal processor monitors a signal of the photodetector. The fiber optic element can include at least one optical fiber positioned within a protective tube. The fiber optic element can include two fiber optic elements coupled to the test region. The optical fiber and the protective tube can have lengths sufficient to situate the photodetector outside of an engine compartment. A plurality of fuel nozzles and a plurality of fiber optic elements can be used with the fiber optic elements being coupled to respective fuel nozzles and either to the photodetector or, wherein a plurality of photodetectors are used, to respective ones of the plurality of photodetectors. The signal processor can include a digital signal processor.

Fiber optic sensors for gas turbine control

A rigid pellicle, used to protect a patterned reticle from contamination in a lithographic process in the manufacture of integrated circuits, is attached to a mounting frame by fusing the pellicle and frame together. In one embodiment, an infrared laser beam is used to produce the fusion along the seam between the pellicle and the frame. The frame may also be attached to the reticle through a similar fusion process. In one embodiment, the pellicle, frame, and reticle are all comprised of fused silica.

Fusion attachment of rigid pellicles and/or frames

A system comprising a reticle, a pellicle and a plurality of sensors attached to at least one of the reticle or pellicle. The sensors are configured to sense in-situ strains on the pellicle as the pellicle is mounted to the reticle or frame.

Characterizing in-situ deformation of hard pellicle during fabrication and mounting with a sensor array

A technique for measuring and selectively adjusting a clearance between a stationary object and desirably a rotating object includes a non-contact, sensing system having a sensor attachable to the stationary object, a mask having a predetermined sized viewport or aperture that sets or limits the sensing or operation of the sensor, and a controller. The sensor is operable for sensing within a field of view a portion of the rotating object and generating a signal in response thereto. The field of view varies in response to varying the clearance between the sensor and the second object. Desirably, the portion of the second object includes a varying pattern. The controller is operable to determine the clearance between the first object and the second object in response to the signal. In another embodiment, sensing system is operable to adjust the clearance by controller providing an electrical current to a resistive heating element in the thermally expandable portion of a plurality of segmented labyrinth seals. The sensing system is also operable to measure vibration of the rotating object.

Apparatus and method for measuring and selectively adjusting a clearance

A method for detecting misalignment of initially-aligned fiber filaments in a composite. An optical fiber is placed among the fiber filaments in the composite, light is directed into the optical fiber, the intensity of the light in the optical fiber is measured during subsequent composite processing, and attenuation in such light intensity is ascertained which indicates such misalignment (e.g., wrinkling, bending, buckling, porosity, delamination and the like) is being detected during such processing. In another preferred method, before-processing and after-processing x-ray images are taken of an x-ray-attenuating fiber which has been placed among x-ray-transparent fiber filaments in a composite.

Method for detecting fiber misalignment in composite manufacturing

Detecting and minimizing fiber misalignment in a composite during

An optical sensor system includes a housing having an open end; first and second windows situated in the housing; a fastener for situating the first window closer to the open end than the second window and permitting an air exchange between a sensing region and the second window; a hermetic seal between the second window and the housing; and an optical sensor situated between the second window and a wall of the housing such that the air exchange does not occur inside the optical sensor. The first and second windows can include materials selected from the group consisting of sapphire, quartz, and glass; the optical sensor to be protected can include silicon carbide; and the sensing region can include a combustion region. If the sensing region includes a combustion region, the first window is situated at a location in the housing sufficiently near enough to the combustion region to vaporize hydrocarbons in the vicinity of the first window, and the second window is situated a location sufficiently far enough from the combustion region so that the hermetic seal remains stable.

Double window for protecting optical sensors from hazardous environments

A sensitive chemiluminescence immunoassay method for field detection of the presence or the amount of low chlorinated biphenyl compounds in a solution is disclosed. The assay has a five minute analysis time and a working range of detection as low as about 1 part per billion chlorinated biphenyl. Kits for the detection of chlorinated biphenyls are disclosed.

Chemiluminescence immunoassay for chlorinated aromatic compound detection

A fiber optic probe system includes a fiber optic probe and a carrier cable coupled to the probe. The carrier cable includes an excitation fiber for receiving excitation light and supplying a portion of the excitation light to the fiber optic probe, a return fiber for receiving detected light from the probe, and a directional coupler coupling the excitation fiber with the return fiber. The directional coupler is situated near an end of the carrier cable which is closest to the probe. A plurality of these fiber optic probes can be multiplexed using a plurality of carrier cables, each cable having a respective excitation fiber for receiving excitation light and supplying the excitation light to a respective one of the plurality of fiber optic probes.

Fiber optic system for remote fluorescent sensing using excitation and

An optical radiation detector, such as a silicon carbide photodiode ultraviolet radiation detector, is employed for real time, noninvasive monitoring and diagnosis of combustion dynamics in gas turbine engines. The SiC photodiode responds to flame ultraviolet emission, and a Fast Fourier Transform spectrum analyzer peak acoustic frequency components of the detector signal as indicators of systematic gas pressure vibrations related to combustion. The combustion may be modified in accordance with the monitored acoustic frequency components.

Growing community of inventors

San Jose, CA, United States of America

Emily Yixie Shu