Technical Manufacturing Corporation

Emil Kraner

Antonio Lopes

Justin Nealey

Apparatus and methods to reduce unwanted motion in a payload of a precision instrument are described. The payload may be supported by an intermediate mass. A feedback signal based upon sensed motion of the intermediate mass may be applied to an intermediate-mass actuator arranged to drive the intermediate mass. Additionally, a feedforward signal may be applied to a payload actuator arranged to drive the payload and used to suppress unwanted motion of the payload. The feedforward signal may be derived from a source within the apparatus or external to the apparatus that would otherwise cause unwanted motion of the payload.

Vibration isolation system

An active damping system for use in connection with a vibration isolation system includes an intermediate mass between a base and an isolated payload. The intermediate mass is supported by at least one support element which also supports at least substantially all of the static forces of the isolated payload. An actuator dampens and isolates dynamic forces acting on the intermediate mass from the isolated payload. The active damping system also includes a payload support element and a passive damping element, both of which are coupled at one end to the payload platform and at an opposite end to the intermediate mass. A sensor is affixed to the intermediate mass to generate a feedback signal to a processor coupled to the actuator.

Active vibration isolation system

An active vibration damping system having a supporting spring for addressing a static force from a payload, and an independent actively isolated damper positioned in parallel between a payload and a source of vibration for damping dynamic force from the payload to an actively isolated point. The actively isolated damper includes a small intermediate mass, distinct and decoupled from the payload mass, and a passive isolator element for dynamic coupling of the isolated platform to the small intermediate mass. The small intermediate mass provides a point to which dynamic forces from the payload may be dampened. The active damper also includes at least one actuator coupled at one surface to the small intermediate mass and coupled at a second surface to the vibrating base platform. A motion sensor may also be provided on the small intermediate mass so as to generate a feedback signal as a function of the movement of the small intermediate mass. The motion sensor together with a compensation/amplifier module and the actuator act as part of a feedback compensation loop for minimizing vibration.

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Swampscott, MA, United States of America

Emil Kraner