Horiba Stec, Co., Ltd.

Horiba, Ltd.

Emiko Nakagawa

Kotaro Takijiri

Yuki Tanaka

Yusuke Kanamaru

Yoshitake Ando

In order to prevent leakage, a fluid control apparatus is adapted to include: a valve provided in the flow path through which the fluid flows; a pressure sensor provided upstream of the valve; a flow rate sensor provided downstream of the pressure sensor; a reference pressure determination part that is inputted with a measured flow rate from the flow rate sensor and on the basis of a flow rate-pressure map, determines a reference pressure corresponding to the measured flow rate; a reference flow rate calculation part that calculates a reference flow rate so that the deviation between the reference pressure and a measured pressure measured by the pressure sensor decreases; and a valve control part that controls the opening of the valve so that the deviation between the reference flow rate and the measured flow rate decreases.

Fluid control apparatus and flow rate ratio control apparatus

A fluid control device is adapted to include: a valve provided in a flow path through which a fluid flows; a pressure sensor provided upstream of the valve; a flow rate sensor provided on downstream of the pressure sensor; a set flow rate generator that outputs a set flow rate corresponding to the measured pressure on the basis of a pressure-flow rate map; a valve control part that controls the opening level of the valve so that the deviation between the set flow rate and a measured flow rate decreases; and the set flow rate generator that outputs the set flow rate corresponding to the measured pressure to the valve control part. In addition, the set flow rate generator is adapted to control the set flow rate so that the measured pressure has a value up to a limit pressure.

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Kyoto, Japan

Emiko Nakagawa