Tokyo Ohka Kogyo Co., Ltd.

Emi Uchida

Tsuyoshi Nakamura

Takashi Nagamine

Mai Sugawara

Takumi Namiki

A surface treatment agent containing a silylating agent (A) and a compound (C) having an amide skeleton in a molecule, and a surface treatment method for subjecting an object to be treated to surface treatment using the surface treatment agent.

Surface treatment agent and surface treatment method

A resist composition containing a polymer compound which has a constitutional unit (a0) represented by Formula (a0-1); and an acid generator which is formed of a compound represented by Formula (b1) (in the formulae, Rarepresents an acid dissociable group represented by Formula (a0-r1-1); Ra, Ra, Ra, Ra, and Rarepresent a hydrocarbon group; Yarepresents a quaternary carbon atom; Rrepresents a hydrocarbon group which has a steroid skeleton containing at least one hydroxyl group; Yrepresents a divalent linking group having a single bond or a hetero atom; Vrepresents a single bond, an alkylene group, or a fluorinated alkylene group; and Rrepresents a hydrogen atom, a fluorine atom, or a fluorinated alkyl group). 

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Kawasaki, Japan

Emi Uchida