Taiwan Semiconductor Manufacturing Comp. Ltd.

Emerson Cheng

Chun-Ren Cheng

Yi-Shao Liu

Yi-Hsien Chang

Allen Timothy Chang

Alex Kalnitsky

Ching-Ray Chen

The present disclosure relates to an integrated chip having an integrated optical bio-sensor, and an associated method of fabrication. In some embodiments, the integrated optical bio-sensor has a sensing device arranged within a semiconductor substrate. An optical waveguide structure is located over a first side of the semiconductor substrate at a position over the sensing device. A dielectric structure is disposed onto the optical waveguide structure at a position that separates the optical waveguide structure from a sample retention area configured to receive a sample solution.

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Hsin-Chu, Taiwan

Emerson Cheng