Stmicroelectronics S.r.l.

Consiglio Nazionale Delle Ricerche

Kenosistec S.r.l.

Emanuele Smecca

Antonello Santangelo

Lucio Renna

Clelia Carmen Galati

Leonardo Gervasi

Alessandra Alberti

Stefano Perugini

Michele Abbiati

Salvatore Sanzaro

Antonino La Magna

Gas sensor, comprising: a substrate of semiconductor material; a first working electrode on the substrate; a second working electrode on the substrate, at a distance from the first working electrode; an interconnection layer extending in electrical contact with the first and the second working electrode, configured to change its conductivity when reacting with gas species to be detected. The interconnection layer is of titanium oxide, has a porosity between 40% and 60% in volume and is formed by a plurality of meso-pores having at least one dimension in the range 6-30 nm connected to nano-pores having at least one respective dimension in the range 1-5 nm.

MOx-based gas sensor and manufacturing method thereof

Growing community of inventors

Gela, Italy

Emanuele Smecca