Kla Tencor Corporation

Kla Corporation

Emanuel Saerchen

Andrei V Shchegrov

Stilian Pandev

David Y Wang

Donald Pettibone

Alexander Buettner

Oscar G Florendo

Barry Blasenheim

Li-Min Chen

Martin Brutsch

A system for laser enhanced voltage contrast using an optical fiber is provided. The system includes a vacuum chamber with a stage that secures a wafer. A laser light source outside the vacuum chamber directs light to an optical fiber. The optical fiber transmits all wavelengths of light from the laser light source into the vacuum chamber through a wall of the vacuum chamber.

Delivery of light into a vacuum chamber using an optical fiber

Methods and systems for performing semiconductor measurements based on hyperspectral imaging are presented herein. A hyperspectral imaging system images a wafer over a large field of view with high pixel density over a broad range of wavelengths. Image signals collected from a measurement area are detected at a number of pixels. The detected image signals from each pixel are spectrally analyzed separately. In some embodiments, the illumination and collection optics of a hyperspectral imaging system include fiber optical elements to direct illumination light from the illumination source to the measurement area on the surface of the specimen under measurement and fiber optical elements to image the measurement area. In another aspect, a fiber optics collector includes an image pixel mapper that couples a two dimensional array of collection fiber optical elements into a one dimensional array of pixels at the spectrometer and the hyperspectral detector.

Semiconductor metrology based on hyperspectral imaging

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Giessen, Germany

Emanuel Saerchen