Centre National De La Recherche Scientifique

Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

Universite Claude Bernard – Lyon1

Cpe Lyon Formation Continue Et Recherche

Elsje Quadrelli

Francois Martin

Chloé Thieuleux

Stéphane Cadot

François Martin

A method of preparing a crystalline thin film having a formula MYincludes (1) preparing an MYamorphous film by atomic layer deposition on a surface of a substrate, and (2) annealing the amorphous MYfilm at 350&#xb0; C. or more to provide the crystalline MYfilm. The amorphous MYfilm is formed from at least one metal M precursor and at least one element Y precursor, wherein x is 1.5 to 3.1, M is tungsten or molybdenum, and Y is sulfur or selenium. Step (1) includes a) introducing a first metal M precursor or element Y precursor into a deposition chamber, b) purging with inert gas, c) introducing a second metal M precursor when the first precursor is element Y, or element Y precursor when the first precursor is metal M, d) purging with inert gas, e) repeating steps a) to d), and f) obtaining the amorphous MYfilm.

Method of forming a crystalline thin film having the formula MYusing an ALD-formed amorphous thin film having the formula MYas a precursor

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Lyons, France

Elsje Quadrelli