Tokyo Electron Limited

Flir Systems, Incorporated

Therma-wave, Inc.

Vuzix Corporation

National Security Technologies LLC

Fibersonde Corporation

Elliot Burke

Clinton Carlisle

Fred E Stanke

Edric Tong

James M Cahill

Douglas E Ruth

Hung The Pham

Michael Weber

Jonathan Charles Geske

Chad Wang

Michel J F Digonnet

Adam Eales Norton

John J Fling

Michael Weber-Grabau

Hung V Pham

Bruce Russell Marshall

Marcus David Knudson

Terrence John Davies

Gerald Daniel Stevens

Embodiments of the invention describe an illuminator having a light source to originate an illumination beam, wherein the light source further comprises a set of vertical-cavity surface emitting lasers (VCSELs), including a first VCSEL having a first laser emission wavelength, and a second VCSEL having a second laser emission wavelength different than the first laser emission wavelength. Thus, by varying laser emission wavelengths of VCSELs in a VCSEL array, embodiments of the invention produce low-contrast speckle, and do not limit the imaging capabilities of the host illumination system. In some embodiments of the invention, vertical external cavity surface emitting lasers (VECSELs) are utilized to produce the above described varying laser emission wavelengths.

Multi-wavelength VCSEL array to reduce speckle

A compact near eye display generates image segments for a first dimension of an intended image. Each of the image segments is transformed into angularly distinguished beamlets that converge through a first dimension pupil within an eyebox. A scanning optic angularly separates the angularly distinguished beamlets of different image segments for creating a second dimension pupil. The angularly distinguished and separated beamlets propagate along a waveguide in a form that minimizes the thickness of the display in front of a viewer's eye and limits the overall size of the optics required to support the projection of virtual images into the viewer's eye.

Compact near eye display with scanned image generation

A display platform orients a virtual image in alignment with a viewer's eye. A transmissive plate receives a light beam conveying the virtual image into the transmissive plate for propagation by internal reflection between inner and outer surfaces of the transmissive plate along the length of the transmissive plate. A plurality of reflective facets progressively interrupt the propagation of the light beam along the length of the transmissive plate for reflecting successive portions of the light beam in a direction for rendering the virtual image visible to the viewer.

Beam segmentor for enlarging viewing aperture of microdisplay

The present invention includes an interferometer for VISAR. Optionally, the present VISAR system includes intracavity imaging design with converging beams and field elements to, among other possible purposes, image the array. An optional embodiment of the present VISAR system may also optionally include precision fiber arrays. Optionally, the present system may use non-collimated beams to allow intracavity access to individual channels for one or more additional delay paths.

VISAR interferometer with field elements

This invention is an apparatus for imaging metrology, which in particular embodiments may be integrated with a processor station such that a metrology station is apart from but coupled to a process station. The metrology station is provided with a first imaging camera with a first field of view containing the measurement region. Alternate embodiments include a second imaging camera with a second field of view. Preferred embodiments comprise a broadband ultraviolet light source, although other embodiments may have a visible or near infrared light source of broad or narrow optical bandwidth. Embodiments including a broad bandwidth source typically include a spectrograph, or an imaging spectrograph. Particular embodiments may include curved, reflective optics or a measurement region wetted by a liquid. In a typical embodiment, the metrology station and the measurement region are configured to have 4 degrees of freedom of movement relative to each other.

Apparatus for imaging metrology

Wafer metrology apparatus and method

An acceleration transducer for use in an accelerometer includes a proof mass that comprises a transmissive optics device arranged to receive an optical signal such that the optical signal propagates through the transmissive optics device along a first optical path having a selected optical path length. A support assembly is arranged to support the proof mass such that the transmissive optics device moves from a reference position along a selected sensing axis in response to an acceleration of the proof mass along the selected sensing axis and produces an optical path length change that indicates the acceleration.

Fiber optic accelerometer

Growing community of inventors

Goleta, CA, United States of America

Elliot Burke