International Business Machines Corporation

Elizabeth T Webster

Anthony K Stamper

Vincent James McGahay

Edward Crandal Cooney, Iii

William Thomas Motsiff

Robert Michael Geffken

Christy Sensenich Tyberg

David C Thomas

Mark P Murray

Amanda L Piper

A method of reworking BEOL (back end of a processing line) metallization levels of damascene metallurgy comprises forming a plurality of BEOL metallization levels over a substrate, forming line and via portions in the BEOL metallization levels, selectively removing at least one of the BEOL metallization levels to expose the line and via portions, and replacing the removed BEOL metallization levels with at least one new BEOL metallization level, wherein the BEOL metallization levels comprise a first dielectric layer and a second dielectric layer, and wherein the first dielectric layer comprising a lower dielectric constant material than the second dielectric layer.

Single and multilevel rework

Growing community of inventors

Richmond, VT, United States of America

Elizabeth T Webster