Other

Touchstone Research Laboratory, Ltd.

Elizabeth N Kraftician

Brian E Joseph

Thomas M Matviya

A microsystem manipulation apparatus and an associated kit is described that may be used to facilitate the assembly and testing of Microsystems and microsystem components. The microsystem manipulation apparatus may include a scanning electron microscope imaging system, a stage, and at least one manipulator having an associated tool. The microsystem manipulation apparatus may be partially or fully automated to provide for routine microsystem assembly, disasembly, and/or testing. The associated kit may include one or more manipulators and associated tools for retrofitting an existing scanning electron microscope to produce a microsystem manipulation apparatus.

Microsystem manipulation apparatus

A novel MEMS assembly and testing system that utilizes a scanning electron microscope (SEM) having 5 axes of freedom as the imaging instrument. Microgrippers or other tools mounted at the end of a linear motion feed through device having a motion resolution of about 10 nanometers are used as the manipulator. All of the assembly features are located inside of a vacuum chamber to permit operation of the SEM imaging system. A variety of other auxiliary devices that support the MEMS assembly and testing system are also included to enhance the capabilities thereof.

Microelectromechanical system assembly and testing device

A novel MEMS assembly and testing system that utilizes a scanning electron microscope (SEM) typically having 5 axes of freedom as the imaging instrument. Microgrippers or other tools mounted at the end of a linear motion feed through device having a motion resolution of about 10 nanometers are used as the manipulator. All of the assembly features are located inside of a vacuum or operating chamber to permit operation of the SEM imaging system. A variety of other auxiliary devices that support the MEMS assembly and testing system are also included to enhance the capabilities thereof.

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Wheeling, WV, United States of America

Elizabeth N Kraftician