Other

Cymer, Inc.

Elizabeth Marsh

Alexander Igorevich Ershov

Richard L Sandstrom

Richard G Morton

Richard C Ujazdowski

Robert N Jacques

R Kyle Webb

Xiaojiang Jason Pan

David J Warkentin

John Martin Algots

Thomas A Yager

Edward F Crawley

Walter Dale Gillespie

John T Melchior

Vladimir B Fleurov

Mansour Ashtiani

Holger K Glatzel

William N Partio

Leonard Lublin

Kenneth Alan Gassman

Matthew Ball

Rale Richard Wolf

The present invention provides long life optics for a modular, high repetition rate, ultraviolet gas discharge laser systems producing a high repetition rate high power output beam. The invention includes solutions to a surface damage problem discovered by Applicants on CaFoptics located in high pulse intensity sections of the output beam of prototype laser systems. Embodiments include an enclosed and purged beam path with beam pointing control for beam delivery of billions of output laser pulses. Optical components and modules described herein are capable of controlling ultraviolet laser output pulses with wavelength less than 200 nm with average output pulse intensities greater than 1.75&#xd7;10Watts/cmand with peak intensity or greater 3.5&#xd7;10Watts/cmfor many billions of pulses as compared to prior art components and modules which failed after only a few minutes in these pulse intensities. Techniques and components are disclosed for minimizing the potential for optical damage and for reducing the pulse energy density to less than 100&#xd7;10J/cm. Important improvements described in this specification have been grouped into the following subject matter categories: (1) Solution to CaFsurface damage discovered by Applicants, (2) description of a high power ArF MOPA laser system, (3) description of beam delivery units, (4) polarization considerations (5) a high speed water-cooled auto shutter energy detector module and (6) other improvements.

High power deep ultraviolet laser with long life optics

A method and apparatus for a damped steering assembly are provided. The damped steering assembly includes a steering wheel attached to a steering column. Disposed between the steering wheel and the steering column is an active vibration control mechanism. The active vibration control mechanism damps vibration transmitted from the steering column to the steering wheel.

Method and apparatus for vibration control

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Melrose, MA, United States of America

Elizabeth Marsh