Vat Holding Ag

Eligio Belleri

Florian Ehrne

Martin Netzer

Andreas Hofer

Marco Apolloni

Stefan Schoch

Thomas L Swain

Andreas Mark

A wafer transfer unit includes at least one data processing unit, which is configured at least for a registration and/or processing of sensor data of at least one sensor, allocated to at least one sub-component of a wafer transfer system, of a sensor module, in particular includes at least one wafer processing module of the wafer transfer system, includes at least one wafer interface system of the wafer transfer system with a wafer transport container and a loading and/or unloading station for a loading and/or unloading of the wafer transport container and/or of the wafer processing module, includes at least one wafer transport container transport system of the wafer transfer system and/or includes at least one wafer handling robot of the wafer transfer system.

Wafer transfer unit and wafer transfer system

A closing unit for a vacuum valve includes a first valve plate () for closing a first valve opening () of the vacuum valve, a second valve plate () for closing a second valve opening () of the vacuum valve, and a carrier plate () that lies between the valve plates () to which the valve plates () are fastened detachably. For fastening a corresponding valve plate () to the carrier plate (), at least one clamping piece () is used by which interacting clamping surfaces (-) are clamped with each other. Of the interacting clamping surfaces (-), at least one is constructed as an angular surface by which the corresponding valve plate () is pressed against the carrier plate ().

Closing unit for a vacuum valve

Growing community of inventors

Balzers, Liechtenstein

Eligio Belleri