Advanced Micro Devices Corporation

Globalfoundries Inc.

Other

Advance Micro Devices, Inc.

Micro Devices LLC

Elfido Coss, Jr

Michael R Conboy

Sam H Allen, Jr

Patrick J Ryan

Michael Lee Miller

Brian K Cusson

Russel Shirley

Thomas J Sonderman

Qingsu Wang

Naomi M Jenkins

Richard J Markle

Eric Omar Green

Christopher Allen Bode

Alexander James Pasadyn

Jin Wang

Susan Hickey

Patrick M Cowan

Danny C Shedd

Matthew A Purdy

Robert J Chong

Gregory A Cherry

Jason Alan Grover

Ernest Dean Adams, Iii

Howard Ernest Castle

Rajesh Vijayaraghavan

Bryce A Hendrix

Eric Christensen

Anthony John Toprac

Kevin R Lensing

William Jarrett Campbell

Anastasia Oshelski Peterson

Gerald L Goff

Scott Gregory Bushman

Terrence J Riley

Tom Tse

Mark K Sze-To

Robert W Anderson

Mike Simpson

A method and an apparatus are provided for parallel fault detection. The method comprises receiving data associated with processing of a workpiece by a first processing tool, receiving data associated with processing of a workpiece by a second processing tool and comparing at least a portion of the received data to a common fault model to determine if a fault associated with at least one of the processing of the workpiece by the first processing tool and processing of the workpiece by the second processing tool occurred.

Parallel fault detection

A method and apparatus is provided for associating operational data with workpieces and correlating the operational data with yield data. The method comprises processing a workpiece using a processing tool, associating the operational data with the workpiece during the processing of the workpiece and measuring the yield data associated with the processed workpiece. The method further comprises correlating the operational data with the yield data to make one or more determinations.

Associating data with workpieces and correlating the data with yield data

A method includes collecting trace data associated with a first device tester. A tester health metric is generated for the first device tester. At least one device tested by the first device tester is retested responsive to determining the tester health metric violates a predetermined threshold. A system includes a first device tester operable to test devices and a tester monitoring unit. The tester monitoring unit is operable to collect trace data associated with the first device tester, generate a tester health metric for the first device tester, and initiate a retest of at least one device tested by the first device tester responsive to determining the tester health metric violates a predetermined threshold.

Method and apparatus for correlating test equipment health and test results

The present invention is generally directed to various methods and systems for isolating process equipment using sensor data. In one illustrative embodiment, the method includes providing at least two processing tools wherein the tools produce different process results when performing a target process operation, acquiring support facility data using a plurality of sensors, and analyzing the acquired support facility data to determine a cause for the processing tools producing different process results.

Methods and systems for analyzing process equipment processing variations using sensor data

A method includes collecting trace data associated with a plurality of device testers. Tester health metrics are generated for each of the device testers. The tester health metrics are analyzed to identify a selected tester health metric that diverges from the plurality of tester health metrics. A corrective action is initiated for the tester associated with the selected tester health metric. A method includes collecting trace data associated with a plurality of device testers. The trace data for each of the device testers is compared to a reference trace data set to generate tester health metrics for each of the device testers based on the difference therebetween. The tester health metrics are analyzed to identify a selected tester health metric that diverges from the plurality of tester health metrics. A corrective action is initiated for the tester associated with the selected tester health metric.

Method and apparatus for matching test equipment calibration

A method and apparatus are provided for initiating test runs based on a fault detection result. The method comprises receiving operational data associated with processing of a workpiece by a processing tool, processing the operational data to determine fault detection results; and causing a test run to be performed based on at least a portion of the fault detection results.

Initiating test runs based on fault detection results

The present invention is generally directed to various methods and systems for fault detection control of multiple tools based upon external data. In one illustrative embodiment, the method includes monitoring each of a plurality of tools to determine if a fault condition occurs in any of the tools, each of the tools being comprised of at least one integrated metrology device, monitoring external data regarding at least one parameter that may impact an operation performed in each of the tools, and determining if an indicated fault condition in at least one of the tools is a valid fault condition or a systemic fault condition associated with a change in a value of the at least one parameter.

Method and apparatus for fault detection classification of multiple tools based upon external data

A method and apparatus is provided for fault notification based on a severity level. The method comprises detecting a fault associated with a processing tool that is adapted to process one or more workpieces, determining a fault severity level of the detected fault and selecting at least one user to notify of the fault based on the severity level of the fault.

Fault notification based on a severity level

In one example, the method includes operating a process tool that has a plurality of sensors for sensing at least one parameter associated with the operation of the process tool, obtaining data from the sensors and determining at least one maintenance activity for the process tool based upon the data obtained from the sensors. In another example, data from the sensors is provided to a controller that analyzes the data and indicates desired variations in at least one maintenance activity to be performed on the process tool based upon the analysis of the data. In yet another example, the controller identifies a plurality of maintenance activities to be performed on the process tool based upon the analysis of the data.

Method of dynamically designing a preventative maintenance schedule based upon sensor data, and system for accomplishing same

An automated material handling system is presented for a manufacturing facility divided into separate fabrication areas. The automated material handling system plans and carries out the movement of work pieces between fabrication areas and maintains a database indicating the location of each work piece within the manufacturing facility. In one embodiment, the automated material handling system accomplishes the containerless transfer of semiconductor wafers through a wall separating a first and second fabrication areas. The wafers are transported within containers (e.g., wafer boats). The material handling system includes a number of transfer tools, including air lock chambers, mass transfer systems, robotic arms, and stock areas. The material handling system also includes a control system which governs the operations of the transfer tools as well as the dispersal of containers. The air lock chambers provide isolation between fabrication areas while permitting the transfer of wafers between the fabrication areas. A mass transfer system positioned within each air lock chamber allows for containerless transfer of wafers through the air lock chamber. The stock areas provide storage areas for containers adjacent to the air lock chambers. The robotic arms are used to move containers between the stock areas and the air lock chambers. The control system includes a main processor, a remote processor associated with each fabrication area, an internal network transmission medium coupling the main processor to the remote processors, and a cell network transmission medium within each fabrication area coupling the corresponding remote processor to one or more transfer tools.

Automated material handling system for a manufacturing facility divided into separate fabrication areas

A method and apparatus is provided for routing workpieces based upon detecting a fault. The method comprises routing a workpiece to a first processing tool identified by a dispatch system, detecting a fault condition associated with the first processing tool and notifying the dispatch system of the detected fault condition. The method further comprises routing a second workpiece to a second processing tool in response to the dispatch system being notified of the fault condition.

Routing workpieces based upon detecting a fault

Management of multiple types of empty carriers in automated material handling systems. In one embodiment, an automated material handling system (AMHS) includes a plurality of material carriers including a plurality of empty carriers classified into two or more types and one or more stock areas, each including a plurality of bins for storing material carriers. Each stock area is associated with one or more thresholds for each empty carrier type. The AMHS further includes a control system coupled to a first one of the stock areas for computing an empty percentage for each empty carrier type. The empty percentage for a particular empty carrier type is the percentage of bins of the first one stock area which contain empty carriers of the particular type. The AMHS also includes a transportation system responsive to the control system for selectively moving an empty carrier of a certain carrier type between a staging area and the first stock area based on a comparison of the empty percentage for the certain carrier type to the one or more thresholds of the first stock area for the certain carrier type.

Management of multiple types of empty carriers in automated material handling systems

A method and an apparatus are provided for conflict resolution among a plurality of controllers. The method includes receiving a first control instruction from a first process controller to process a workpiece, receiving a second control instruction from a second process controller to process the workpiece and adjusting at least one of the first control instruction and the second control instruction to process the workpiece to achieve a desired process goal.

Conflict resolution among multiple controllers

A method is provided for configuring a final data set to use for modeling a manufacturing process, the method including requesting a real-time data set from a real-time database, requesting an historical data set from an historical database, and defining a required format for the final data set. The method also includes combining the real-time data set from the real-time database with the historical data set from the historical database using the required format for the final data set.

Automated system for extracting and combining tool trace data and wafer electrical test (WET) data for semiconductor processing

The present invention is generally directed to fault detection and control methodologies for ion implant processes, and a system for performing same. In one illustrative embodiment, the method comprises performing a tuning process for an ion implant tool, the tuning process resulting in at least one tool parameter for the ion implant tool, selecting or creating a fault detection model for an ion implant process to be performed in the ion implant tool based upon the tool parameter resulting from the tuning process, and monitoring an ion implant process performed in the ion implant tool using the selected or created fault detection model. In another illustrative embodiment, the method comprises performing a tuning process for an ion implant tool, the tuning process resulting in at least one tool parameter for the ion implant tool, and determining if the tool parameter resulting from the tuning process is acceptable based on historical metrology data for implant regions formed in at least one substrate subjected to an ion implant process performed in the ion implant tool.

Growing community of inventors

Austin, TX, United States of America

Elfido Coss, Jr