Instituto Superior Tecnico

Elena Stefanova Tatarova

Luis Paulo Da Mota Capitao Lemos Alves

Julio Paulo Dos Santos Duarte Vieira Henriques

Bruno Miguel Soares Goncalves

Júlio Paulo Dos Santos Duarte Vieira Henriques

Bruno Miguel Soares GONÇALVES

Luís Paulo Da Mota CAPITÃO Lemos Alves

The present invention relates to a process, reactor and system to produce self-standing two-dimensional nanostructures, using a microwave-excited plasma environment. The process is based on injecting, into a reactor, a mixture of gases and precursors in stream regime. The stream is subjected to a surface wave electric field, excited by the use of microwave power which is introduced into a field applicator, generating high energy density plasmas, that break the precursors into its atomic and/or molecular constituents. The system comprises a plasma reactor with a surface wave launching zone, a transient zone with a progressively increasing cross-sectional area, and a nucleation zone. The plasma reactor together with an infrared radiation source provides a controlled adjustment of the spatial gradients, of the temperature and the gas stream velocity.

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Carcavelos, Portugal

Elena Stefanova Tatarova