Von Ardenne Asset Gmbh &co. Kg

Ekkehart Reinhold

Maik Vieluf

Joerg Faber

Lars Ullmann

In accordance with various embodiments, an electron beam evaporator can comprise the following: a tubular target; an electron beam gun for producing at least one vapor source on a removal surface of the tubular target by means of an electron beam; wherein the removal surface is a ring-shaped axial end surface or a surface of the tubular target that extends conically or in a curved fashion from the free end edge.

Electron beam evaporator, coating apparatus and coating method

The disclosure relates to a method for coating a substrate with particles, wherein the following method steps are carried out in a vacuum: positioning a substrate surface of the substrate to be coated in a vacuum and in the direction of a region in which there are disposed solid particles with which the substrate surface is to be coated; and; and introducing electrons into the solid particles for electrostatic charging of the solid particles in such a way that a force brought about by the electrostatic charging separates the solid particles from one another and accelerates them in the direction of the substrate surface of the substrate for coating of the substrate surface with at least a portion of the separated solid particles. A device that can be used in accordance with the disclosure has a particle container, a substrate holder and an electron source.

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Dresden, Germany

Ekkehart Reinhold