Rohm Co., Ltd.

Eitaro Kurokawa

Yoshikazu Fujimori

Noriyuki Shimoji

An inkjet printing headincludes a pressure chamber, a movable film formation layerthat includes a movable filmA defining a top surface portion of the pressure chamber, and a piezoelectric elementthat is formed to contact a surface of the movable filmA at an opposite side from the pressure chamberand having a peripheral edge receded further toward an interior of the pressure chamberthan the movable filmA in plan view. The piezoelectric elementincludes a lower electrodeformed on a surface of the movable film formation layerat the opposite side from the pressure chamber, an upper electrodedisposed at an opposite side from the movable film formation layerwith respect to the lower electrode, and a piezoelectric filmprovided between the upper electrodeand the lower electrode, and the upper electrodehas a thin portionat least at a portion of a peripheral edge portion.

Piezoelectric film utilization device

There is provided a nozzle substrate including a nozzle hole penetrating in a thickness direction. The nozzle substrate includes a main substrate including a first surface and a second surface, an adhesion layer formed on the second surface of the main substrate, and a water repellent film formed on a surface at an opposite side to the main substrate side of the adhesion layer. The nozzle hole includes a recessed part formed on the first surface of the main substrate, and an ink ejecting path formed on a bottom surface of the recessed part and penetrating a bottom wall of the recessed part. The ink ejecting path includes a first ink ejecting path, a second ink ejecting path, and a third ink ejecting path. An inner circumference surface of the third ink ejecting path is approximately perpendicular to the second surface of the main substrate.

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Kyoto, Japan

Eitaro Kurokawa