Applied Materials Israel Limited

Eitan Kidron

Dror Shemesh

Igor Petrov

Igor Krivts (Krayvitz)

Guy Eitan

Igal Ben-Dayan

A method and a stage structure for use in a vacuum environment, the stage structure includes a first low-outgassing plate and first high-outgassing associated components that are encapsulated by first low-outgassing covering elements, wherein the first low-outgassing plate is arranged to be coupled to a first motor that is arranged to move the first low-outgassing plate along a first direction, an outgassing level of each of the first low-outgassing plate and the first low-outgassing covering elements does not exceed a tolerable level of outgassing in the vacuum environment, and an outgassing level of each first high-outgassing associated component is above the tolerable level of outgassing in the vacuum environment.

Stage structure for operation in vacuum

An apparatus is disclosed for forming a sample of an object, extracting the sample from the object, and subjecting this sample to microanalysis including surface analysis and electron transparency analysis in a vacuum chamber. In some embodiments, a means is provided for imaging an object cross section surface of an extracted sample. Optionally, the sample is iteratively thinned and imaged within the vacuum chamber. In some embodiments, the sample is situated on a sample support including an optional aperture. Optionally, the sample is situated on a surface of the sample support such that the object cross section surface is substantially parallel to the surface of the sample support. Once mounted on the sample support, the sample is either subjected to microanalysis in the vacuum chamber, or loaded onto a loading station. In some embodiments, the sample is imaged with an electron beam substantially normally incident to the object cross section surface.

Apparatus for sample formation and microanalysis in a vacuum chamber

Wafer supporting apparatus, including an electrostatic chuck for supporting the wafer. The apparatus further includes an electrostatic shield which is positioned in proximity to the chuck and the wafer, and a voltage source which is coupled to apply an electric field between the chuck and the wafer. The voltage source applies one or more potentials to the electrostatic shield so as to prevent penetration of particles to the wafer.

Particle trap for electrostatic chuck

Methods and apparatus are disclosed for forming a sample of an object, extracting the sample from the object, and subjecting this sample to microanalysis including surface analysis and electron transparency analysis in a vacuum chamber. In some embodiments, a method is provided for imaging an object cross section surface of an extracted sample. Optionally, the sample is iteratively thinned and imaged within the vacuum chamber. In some embodiments, the sample is situated on a sample support including an optional aperture. Optionally, the sample is situated on a surface of the sample support such that the object cross section surface is substantially parallel to the surface of the sample support. Once mounted on the sample support, the sample is either subjected to microanalysis in the vacuum chamber, or loaded onto a loading station. In some embodiments, the sample is imaged with an electron beam substantially normally incident to the object cross section surface.

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Eitan Kidron