Seiko Instruments Inc

Agency Industrial Science and Seiko Instruments Inc.

Eisuke Tomita

Naoto Moriya

Masatoshi Yasutake

Hiroshi Muramatsu

Toshihiko Sakuhara

Masato Iyoki

Kingo Itaya

Kazushi Yamanaka

Masao Hasegawa

A magnetic force sensor detects a magnetic force of a magnetic sample having a given magnetization direction. The magnetic force sensor comprises a magnetic probe having a tip portion. The tip portion has an electrolytically plated film of hard-magnetic material effective to maintain the magnetization direction of the probe constant and parallel to the given magnetization direction of the sample.

Cantilever magnetic force sensor for magnetic force microscopy and method of manufacturing magnetic force sensor

A scanning probe microscope comprises an elastic probe having a longitudinal axis and a probe tip. A vibration device has a piezoelectric vibrating member and an AC voltage generator for vibrating the probe tip relative to a surface of a sample. A vibration detecting device has a piezoelectric detecting member and a current/voltage amplifier circuit for detecting vibration of the probe tip. A probe holder supports the probe such that the probe is biased into pressure contact with the piezoelectric detecting member at an oblique angle relative to the longitudinal axis of the probe while the probe tip extends in a Z direction generally perpendicular to sample surface during vibration of the probe tip relative to the sample surface. A coarse movement mechanism effects coarse displacement of the probe tip in the Z direction to bring the probe tip close to the surface of the sample. A sample-to-probe distance control device has a fine displacement element and a servo circuit for effecting fine displacement of the probe tip in the Z direction. A two-dimensional scanning device has a fine displacement element and a scanning circuit for scanning the probe tip in X and Y directions to generate a measurement signal. A data processing device converts the measurement signal into a three-dimensional image.

Scanning probe microscope having piezoelectric member for controlling movement of probe

A scanning probe microscope comprises a cantilever probe disposable proximate a surface of a sample and having a first resonance frequency. A three-dimensional fine movement element scans the cantilever probe and the surface of the sample relative to one another two-dimensionally. A sensor cantilever detects displacement of the cantilever probe during relative scanning movement between the cantilever probe and the surface of the sample. The sensor cantilever has a second resonance frequency different from the first resonance frequency and is disposed spaced apart but within touching distance from the cantilever probe so that displacement of the cantilever probe is transmitted to the sensor cantilever by contact between the sensor cantilever and the cantilever probe.1

Scanning probe microscope

A scanning probe microscope comprises a probe extending in a Z direction, a piezoelectric vibrating body for vibrating the probe relative to a surface of a sample, and a vibration detecting device having a quartz oscillator for detecting the probe vibration. A biasing member biases the probe into pressure contact with the quartz oscillator of the vibration detecting device to integrally connect the probe to the quartz oscillator. A coarse displacement device effects coarse displacement of the probe in the Z direction. A fine displacement device effects fine displacement of the probe in the Z direction. A scanning device scans the probe in X and Y directions relative to the surface of the sample to generate a measurement signal. A data processing device converts the measurement signal into a three-dimensional image.

A scanning near-field optical microscope has an optical waveguide probe, a vibration device having a piezoelectric vibrating body and an AC voltage generator for vibrating the probe relative to a surface of a sample. A vibration detecting device has a quartz oscillator and a current/voltage amplifier circuit for detecting vibration of the probe. A resilient body biases the probe into pressure contact with the quartz oscillator. A coarse displacement device effects coarse displacement of the probe to bring the probe close to the surface of the sample. An optical detection device has lenses and a photodetector for detecting light from the sample. A sample-to-probe distance control device has a fine displacement adjustment device and a servo circuit for effecting fine displacement of the probe in the Z direction. A two-dimensional scanning device having a fine displacement device and a scanning circuit scan the probe in X and Y directions. A data processing device converts a measurement signal from the photodetector into a three-dimensional image.

Scanning near-field optical microscope

A magnetic force sensor for detecting a magnetic force of a magnetic sample having a given magnetization direction comprises a magnetic probe having a tip portion. The tip portion is coated with a film of hard-magnetic material effective to maintain the magnetization direction of the probe constant and parallel to the given magnetization direction of the sample. A biasing member has the magnetic probe attached thereto at a free end thereof and is resiliently deflectable in response to the magnetic force between the magnetic probe and the magnetic sample. When the magnetic probe is scanned across the magnetic sample, the distribution of the magnetic force on the magnetic sample is effectively detected.

Cantilever magnetic force sensor for magnetic force microscopy having a

A machining, recording, and reproducing apparatus using a scanning probe microscope comprising: a probe equipped with a probe tip at its front end, a vibration application portion consisting of a piezoelectric vibrating body and an AC voltage-generating portion, a vibration-detecting portion consisting of a quartz oscillator and a current/voltage amplifier circuit, a coarse displacement device for bringing the probe close to a surface of a sample, a sample-to-probe distance control device consisting of a Z fine displacement element and a Z servo circuit, a two-dimensional scanning device consisting of an XY fine displacement element and an XY scanning circuit, and a data-processing device for converting a measurement signal into a three-dimensional image. The probe is held to the quartz oscillator by spring pressure of a resilient body.

Apparatus for machining, recording, and reproducing, using scanning

A high resolution observation apparatus capable of resolving details smaller than the wavelength of a laser beam used for detection includes a probe for scattering evanescent light projected from a sample in response to the incident laser light. The scattered evanescent light is detected by a photodetector located proximate the probe tip. During measurements, the position of the probe is controlled in the Z axis by a fine movement mechanism while being scanned in the XY plane to conduct measurements. The distance between the probe and the sample is maintained constant by use of a Z-axis servo circuit responsive to an output signal of the photodetector for producing a control signal to control the fine movement mechanism to maintain the detected evanescent light constant. A three-dimensional display of an output of the servo circuit is provided.

Scanning near field optical microscope

An atomic force microscope comprises a vibrating device for producing transverse vibrations between a sample and a probe and a vertical load-adjusting device for adjusting the vertical load between the sample and the probe. The sample is vibrated transversely, thus inducing a deflecting vibration on a cantilever. The phase and the amplitude of this deflecting vibration are simultaneously measured. The dependence of the measured value on the vertical load between the sample and the probe is measured. Thus, the friction between the sample and the probe is analyzed.

Atomic force microscope and method of analyzing frictions in atomic

A magnetic force microscope for measuring a magnetic field near a surface of a magnetic sample includes a cantilever having a ferromagnetic probe at one end thereof and receiving a magnetic force from the surface of the magnetic sample. An oscillation device is fixed to another end of the cantilever for oscillating the cantilever. A voltage application device applies an alternating voltage to the oscillation device. A deflection detecting device detects the oscillation of the cantilever. A magnetic field generating device supplies a magnetic field near the ferromagnetic probe. By this construction, it is possible to correct fluctuations in magnetic field measurements using probes with different magnetic characteristics and magnetic field detecting sensitivity, and to measure an absolute value of the detected magnetic field. Further, since the ferromagnetic probe can be magnetized, it is possible to increase the magnetic sensitivity of the ferromagnetic probe.

Method and apparatus for measuring a magnetic field using a magnetic

An apparatus for simultaneously effecting electrochemical measurement and measurement of tunneling current has an electrochemical cell having a sample, a counter electrode, a reference electrode and a tunnel probe. The tunnel probe comprises an elongate body having a pointed tip, the body being composed of gold, gold alloy, graphite or carbon compound.

Apparatus for simultaneously effecting electrochemical measurement and

Apparatus and method for tunnel current measurement observed simultaneously with electrochemical measurement using an electrochemical cell. The electrochemical cell holds a tip, a counter electrode, a reference electrode and a sample in a solution. In the electrochemical cell, a tunnel current flowing between a sample and the tip is detected while controlling the electrode potential of the sample in a solution for electrochemical measurement. The detected tunnel current is represented as the surface image of the sample during electrochemical reaction.

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Chiba, Japan

Eisuke Tomita