Hitachi, Ltd.

Eisuke Mitani

Hiroyasu Shichi

Yukio Okamoto

Atsushi Sumioka

Hiroshi Iwamoto

Setsuo Nomura

Eiichi Izumi

Tadao Okabe

A charged particle beam apparatus comprising a charged particle beam source(s) for generating an ion beam and an electron beam, a focusing lens system for finely focusing each of the generated ion beam and electron beam, a charged particle beam deflecting system for deflecting each of the focused ion beam and electron beam, and a specimen subjected to irradiation thereof with each of the focused ion beam and electron beam is provided with means for detecting the deviation of the irradiation positions of the ion beam and the electron beam on the specimen from each other and means for making the irradiation positions of the ion beam and the electron beam on the specimen coincident with each other on the basis of the result of detection of the deviation of the irradiation positions from each other.

Charged particle beam apparatus

A secondary ion mass spectrometer including primary ion emitting means for generating a primary ion to irradiate a specimen with the primary ion, means for separating secondary ions sputtered from the specimen, in accordance with mass-to-charge ratios, and detection means for detecting a secondary ion current emerging from the secondary ion separating means is disclosed, in which, when the value of the secondary ion current becomes greater than the upper limit of the dynamic range of the detecting means, the secondary ion current is attenuated by an attenuator, and the value of secondary ion current detected by the detection means is divided by the attenuation factor of the attenuator to obtain a corrected value. Thus, the secondary ion mass spectrometer is prevented from producing an erroneous analytical result due to the saturation of the detection means, that is, has a wide dynamic range, in which the amount of secondary ion varies by eight to ten orders of magnitude. Accordingly, the sescondary ion mass spectrometer can quantitatively determine a high-concentration element and a considerably-low-concentration element at the same time, and can determine the concentration distribution of an analytical element in a wide concentration range from a large value to a considerably small value.

Secondary ion mass spectrometer

A method of driving a gas-discharge panel having at least one reset electrode and cathode and anode groups for forming N electrode pairs. The cathodes are p-phase connected (p.gtoreq.3) while the anodes are m-phase connected (m.ltoreq.p). The reset electrode is applied with a reset pulse voltage having a period of T of one frame. Cathode pulse voltages having their pulse widths of (p-1)T/N are successively applied to the cathodes for respective p phases with a phase shift of T/N to each other while anode pulse voltages having their pulse widths of at maximum (m-1)T/N are successively applied to the anodes for respective m phases with a phase shift of T/N to each other. A reset discharge which is generated by the reset pulse voltage and the first one of the cathode pulse voltages and anode pulse voltages applied for each frame and having a value cooperating with the reset pulse voltage value is successively transferred by means of the cathode and anode voltages to display desired information. As a result, the display luminance can be improved (p-1) times without impairing the self-scanning function.

Driving method of gas-discharge display panel

A gas discharge display device comprising alternately disposed anodes and cathodes, wherein the anodes and the cathodes are interconnected respectively in multi-phase connections whereby a bar-graph display can be effected by means of a self-scanning function.

Growing community of inventors

Tokorozawa, Japan

Eisuke Mitani