Kyoto University

Eika Tsunemi

Hirofumi Yamada

Kazumi Matsushige

Kei Kobayashi

Nobuo Satoh

Incident lightemitted from a laser light sourceis reflected on an upper surface of a cantilever, so that reflected lightenters light detection means. Since the incident lightand the reflected lightare in a plane not including a long axis of the cantilever, movements of the reflected lightdue to change in a deflection amount &#x3b8; of the cantileverand due to change in a fine vertical movement amount z thereof are different in direction on the light detection means. This enables the change in the deflection amount &#x3b8; of the cantileverand the change in the fine vertical movement amount z thereof to be separated from output of the light detection means

Growing community of inventors

Kyoto, Japan

Eika Tsunemi