Tokyo Electron Limited

Eiji Masuda

Yoshiyuki Honda

Akira Koguchi

A substrate transporting device and method,transports a plurality of wafers W standing upright in a row, from a previous process, i.e., a cleaning process. A substrate holder,is carried by a transporting device,arranged outside a drying chamber,. The substrate holder,receives the wafers W from the substrate transporting device,while maintaining a posture of the wafers W. The transporting device,lowers the substrate holder,and sequentially moves it into the drying chamber,through an unloading and loading port,above the drying chamber,. Thereafter, the substrate holder,is fixed to a rotor,. After closing the unloading and loading port,with a lid body,, the rotor,is rotated. In this way, moisture sticking to surfaces of the wafers W is eliminated.

Growing community of inventors

Tosu, Japan

Eiji Masuda