Tokki Corporation

Eichi Matsumoto

Yoshinari Kondo

Kentaro Suzuki

Miyuki Tajima

There is provided a film-forming device capable of advantageously superimposing and securing a substrate, a weight member, and/or a magnetic body while maintaining the precisely aligned substrate and mask in a superimposed state. The film-forming device is provided with a film-forming maskand film-forming means for forming a thin film on the substrateon which the film-forming maskhas been superimposed. The film-forming device comprises an aligning mechanism for moving the film-forming maskand the substraterelative to one another so that the film-forming maskand the substrateare aligned; a first superimposing and securing mechanism for superimposing and securing the substrateand the film-forming maskaligned by the aligning mechanism; and a second superimposing and securing mechanism for superimposing and securing the substrate superimposed and secured to the film-forming maskby the first superimposing and securing mechanism, and a magnetic bodyfor magnetically attracting to an obverse surface side of the substratethe film-forming maskor a weight memberin the form of a sheet for causing the substrateto bend and causing the substrateto be affixably superimposed on the film-forming maskso that the film-forming maskis affixably superimposed on the substrate, the weight member being disposed on a reverse surface of the substrate

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Mitsuke, Japan

Eichi Matsumoto