Koninklijke Philips Corporation N.V.

Egon Krafczyk

Mareike K Klee

Hans-Peter Loebl

Peter Klaus Bachmann

Hans-Wolfgang Brand

The invention relates to an array of ultrasound transducers which each comprise a membrane that is comprised of diamond or diamond-like carbon, a barrier structure, a piezoelectric layer, a first electrode and a second electrode. The barrier structure ensures strong adhesion of the piezoelectric layer to the barrier structure and thus to the device and that the piezoelectric layer only comprises a single phase. In addition, the barrier structure protects the membrane against oxidation/decomposition during the manufacturing process of piezoelectric layer. The invention further relates to an ultrasound transducer.

Growing community of inventors

Aachen, Germany

Egon Krafczyk