Tata Steel Nederland Technology B.v.

Edzo Zoestbergen

Colin Commandeur

Douglas Hamilton

Timothy Dean Kaiser

Theodorus Franciscus Jozef Maalman

Eduard Paul Mattheus Bakker

Roland Jan Snijders

Stephen James Widdis

Peter William Hazelett

Petrus Cornelis Jozef Beentjes

Robert Bleeker

Ruud Johannes Westerwaal

Daniel Brian Burton

Stephan De Bruijn

Jörgen Van De Langkruis

Antonius Johannes Petrus Bouwens

Johan Jacob Hendrik Wesselink

Douglas Alexander Hamilton

Mark Robert Goodenough

Christiaan Boelsma

A method to operate an apparatus for feeding liquid metal to an evaporator device in a vacuum chamber, wherein the feed tube runs from a container adapted to contain a liquid metal to the evaporator device and wherein an electromagnetic pump is provided in the feed tube and a valve in the feed tube between the electromagnetic pump and the evaporator device. An at least partially gas permeable electromagnetic pump, which is enclosed in a pressure controlled enclosure, is used in the method wherein electromagnetic pump and the pressure controlled enclosure are controlled such that filling and draining of the evaporator device and feed tube can be done without affecting the vacuum pressure in the vacuum chamber.

Method to operate an apparatus for feeding liquid metal to an evaporator device

A method to control the temperature of an electromagnetic pump in an apparatus wherein a liquid metal is supplied through a feed tube from a container adapted to contain a liquid metal to an evaporator device in a vacuum chamber, wherein the temperature of the electromagnetic pump is controlled by controlling one or more of

Method to control the temperature of an electromagnetic pump

An apparatus for feeding liquid metal to an evaporator device in a vacuum chamber, wherein the apparatus includes a container adapted to contain a liquid metal, a feed tube from the closed container to the evaporator device and an electromagnetic pump provided in the feed tube, and wherein the electromagnetic pump is placed in a vacuum enclosure.

Apparatus for feeding a liquid material to an evaporator device

A filter device for reducing the amount of non-vaporous components in a vapour stream, including a carbon foam as filter material capable of being penetrated by the vapour stream and arranged in such a way that the only route for the vapour stream to pass the carbon foam is via penetration of the carbon foam. The device is in particular suitable for coating a substrate by physical vapour deposition of the vapour. The homogenous and single phase vapour stream produced by the filter device results in a smooth coated substrate wherein splashes are virtually absent.

Filter device to remove particles from a vapour stream

A valve for a high temperature liquid, more in particular for liquid ZnMg, wherein the valve parts are made of ceramic material and graphite to be heat-resistant against the temperature of these liquid metals.

Valve for high temperature liquid

An apparatus and method for controlling the composition of liquid metal fed to an evaporator in a vacuum chamber used in a physical vapor deposition process.

Method and apparatus for controlling the composition of liquid metal in an evaporator device

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Alkmaar, Netherlands

Edzo Zoestbergen