Tel Solar Ag

Edwin Pink

Philipp Hotz

The invention relates to a vacuum processing system for processing a substrate (), with an enclosure () for carrying the substrate () to be treated in a substrate plane (), whereby the enclosure () comprises a first reflecting means () and a heating means () having a first plane surface () and an opposed second plane surface (), the heating means () is configured for irradiating heating energy only via the first surface () and/or via the second surface (), the first reflecting means () is configured for reflecting the heating energy irradiated by the heating means () onto the substrate plane (), and the heating means () is arranged such that the first surface () faces towards the first reflecting means () and the second surface () faces towards the substrate plane ().

Growing community of inventors

Chur, Switzerland

Edwin Pink